ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results...

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Bibliographic Details
Main Authors: Min Hsiung Hon, Yen Hsun Su, Wei Hao Lai, Lay Gaik Teoh, Shih Min Chou
Format: Article
Language:English
Published: MDPI AG 2006-10-01
Series:Sensors
Subjects:
ZnO:Al
sputtering
ethanol gas sensor
thin films.
Online Access:http://www.mdpi.com/1424-8220/6/10/1420/

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