The At-Wavelength Metrology Facility at BESSY-II
The At-Wavelength Metrology Facility at BESSY-II is dedicated to short-term characterization of novel UV, EUV and XUV optical elements, such as diffraction gratings, mirrors, multilayers and nano-optical devices like reflection zone plates. It consists of an Optics Beamline PM-1 and a Reflectometer...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Forschungszentrum Jülich
2016-02-01
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| Series: | Journal of large-scale research facilities JLSRF |
| Online Access: | http://jlsrf.org/index.php/lsf/article/view/72 |
| _version_ | 1819043835436597248 |
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| author | Franz Schäfers Andrey Sokolov |
| author_facet | Franz Schäfers Andrey Sokolov |
| author_sort | Franz Schäfers |
| collection | DOAJ |
| description | The At-Wavelength Metrology Facility at BESSY-II is dedicated to short-term characterization of novel UV, EUV and XUV optical elements, such as diffraction gratings, mirrors, multilayers and nano-optical devices like reflection zone plates. It consists of an Optics Beamline PM-1 and a Reflectometer in a clean-room hutch as a fixed end station. The bending magnet Beamline is a Plane Grating Monochromator beamline (c-PGM) equipped with an SX700 monochromator. The beamline is specially tailored for efficient high-order suppression and stray light reduction. The versatile 11-axes UHV-Reflectometer can house life-sized optical elements, which are fully adjustable and of which the reflection properties can be measured in the full incidence angular range as well as in the full azimuthal angular range to determine polarization properties. |
| first_indexed | 2024-12-21T10:03:06Z |
| format | Article |
| id | doaj.art-0d3fbc8046874b05b750fa1c37e97e61 |
| institution | Directory Open Access Journal |
| issn | 2364-091X |
| language | English |
| last_indexed | 2024-12-21T10:03:06Z |
| publishDate | 2016-02-01 |
| publisher | Forschungszentrum Jülich |
| record_format | Article |
| series | Journal of large-scale research facilities JLSRF |
| spelling | doaj.art-0d3fbc8046874b05b750fa1c37e97e612022-12-21T19:07:53ZengForschungszentrum JülichJournal of large-scale research facilities JLSRF2364-091X2016-02-012A5010.17815/jlsrf-2-7267The At-Wavelength Metrology Facility at BESSY-IIFranz Schäfers0Andrey Sokolov1Helmholtz-Zentrum Berlin für Materialien und EnergieHelmholtz-Zentrum Berlin für Materialien und EnergieThe At-Wavelength Metrology Facility at BESSY-II is dedicated to short-term characterization of novel UV, EUV and XUV optical elements, such as diffraction gratings, mirrors, multilayers and nano-optical devices like reflection zone plates. It consists of an Optics Beamline PM-1 and a Reflectometer in a clean-room hutch as a fixed end station. The bending magnet Beamline is a Plane Grating Monochromator beamline (c-PGM) equipped with an SX700 monochromator. The beamline is specially tailored for efficient high-order suppression and stray light reduction. The versatile 11-axes UHV-Reflectometer can house life-sized optical elements, which are fully adjustable and of which the reflection properties can be measured in the full incidence angular range as well as in the full azimuthal angular range to determine polarization properties.http://jlsrf.org/index.php/lsf/article/view/72 |
| spellingShingle | Franz Schäfers Andrey Sokolov The At-Wavelength Metrology Facility at BESSY-II Journal of large-scale research facilities JLSRF |
| title | The At-Wavelength Metrology Facility at BESSY-II |
| title_full | The At-Wavelength Metrology Facility at BESSY-II |
| title_fullStr | The At-Wavelength Metrology Facility at BESSY-II |
| title_full_unstemmed | The At-Wavelength Metrology Facility at BESSY-II |
| title_short | The At-Wavelength Metrology Facility at BESSY-II |
| title_sort | at wavelength metrology facility at bessy ii |
| url | http://jlsrf.org/index.php/lsf/article/view/72 |
| work_keys_str_mv | AT franzschafers theatwavelengthmetrologyfacilityatbessyii AT andreysokolov theatwavelengthmetrologyfacilityatbessyii AT franzschafers atwavelengthmetrologyfacilityatbessyii AT andreysokolov atwavelengthmetrologyfacilityatbessyii |