The At-Wavelength Metrology Facility at BESSY-II
The At-Wavelength Metrology Facility at BESSY-II is dedicated to short-term characterization of novel UV, EUV and XUV optical elements, such as diffraction gratings, mirrors, multilayers and nano-optical devices like reflection zone plates. It consists of an Optics Beamline PM-1 and a Reflectometer...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Forschungszentrum Jülich
2016-02-01
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| Series: | Journal of large-scale research facilities JLSRF |
| Online Access: | http://jlsrf.org/index.php/lsf/article/view/72 |