A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection
As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a m...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/1/63 |
| _version_ | 1819295303132512256 |
|---|---|
| author | Ziyue Wu Jiaqi Wang Chao Bian Jianhua Tong Shanhong Xia |
| author_facet | Ziyue Wu Jiaqi Wang Chao Bian Jianhua Tong Shanhong Xia |
| author_sort | Ziyue Wu |
| collection | DOAJ |
| description | As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a multi-parameter water quality detection integrated sensor chip is further studied, and a portable detection system using this chip is developed. Temperature, pH, oxidation-reduction potential (ORP), conductivity and concentration of copper ions (Cu<sup>2+</sup>) are selected as typical water quality parameters. Experiments of sensor calibrations using this portable detection system were performed in standard solutions. The sensor has a sensitivity of −57.34 mV/pH in pH detection and 5.95 Ω/°C in temperature response. ORP is directly detected by Pt microelectrode on the chip and the relative error is less than 3%. The electrode constant of the sensor is 1.416 cm<sup>−1</sup> and the linearity is 0.9995 in conductivity detection. With the gold nanoparticles deposited on the electrode, the detection peak of Cu<sup>2+</sup> appears at 280 mV and the sensor shows good linearity to the concentration of Cu<sup>2+</sup> in the range of 0−0.6 mg/L. The detection limit of Cu<sup>2+</sup> concentration is 2.33 μg/L. Through measurement and calculation, the accuracy of the portable system is within 4%. This portable multi-parameter water quality detection system with the MEMS-based integrated chip shows great potential in the field and fast detection. |
| first_indexed | 2024-12-24T04:40:04Z |
| format | Article |
| id | doaj.art-0db7cb92cac749099eda86a49d2a5b57 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-24T04:40:04Z |
| publishDate | 2020-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0db7cb92cac749099eda86a49d2a5b572022-12-21T17:14:51ZengMDPI AGMicromachines2072-666X2020-01-011116310.3390/mi11010063mi11010063A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality DetectionZiyue Wu0Jiaqi Wang1Chao Bian2Jianhua Tong3Shanhong Xia4State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100000, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100000, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100000, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100000, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100000, ChinaAs an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a multi-parameter water quality detection integrated sensor chip is further studied, and a portable detection system using this chip is developed. Temperature, pH, oxidation-reduction potential (ORP), conductivity and concentration of copper ions (Cu<sup>2+</sup>) are selected as typical water quality parameters. Experiments of sensor calibrations using this portable detection system were performed in standard solutions. The sensor has a sensitivity of −57.34 mV/pH in pH detection and 5.95 Ω/°C in temperature response. ORP is directly detected by Pt microelectrode on the chip and the relative error is less than 3%. The electrode constant of the sensor is 1.416 cm<sup>−1</sup> and the linearity is 0.9995 in conductivity detection. With the gold nanoparticles deposited on the electrode, the detection peak of Cu<sup>2+</sup> appears at 280 mV and the sensor shows good linearity to the concentration of Cu<sup>2+</sup> in the range of 0−0.6 mg/L. The detection limit of Cu<sup>2+</sup> concentration is 2.33 μg/L. Through measurement and calculation, the accuracy of the portable system is within 4%. This portable multi-parameter water quality detection system with the MEMS-based integrated chip shows great potential in the field and fast detection.https://www.mdpi.com/2072-666X/11/1/63multi-parameterportable systemwater quality detection |
| spellingShingle | Ziyue Wu Jiaqi Wang Chao Bian Jianhua Tong Shanhong Xia A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection Micromachines multi-parameter portable system water quality detection |
| title | A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection |
| title_full | A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection |
| title_fullStr | A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection |
| title_full_unstemmed | A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection |
| title_short | A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection |
| title_sort | mems based multi parameter integrated chip and its portable system for water quality detection |
| topic | multi-parameter portable system water quality detection |
| url | https://www.mdpi.com/2072-666X/11/1/63 |
| work_keys_str_mv | AT ziyuewu amemsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT jiaqiwang amemsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT chaobian amemsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT jianhuatong amemsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT shanhongxia amemsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT ziyuewu memsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT jiaqiwang memsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT chaobian memsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT jianhuatong memsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection AT shanhongxia memsbasedmultiparameterintegratedchipanditsportablesystemforwaterqualitydetection |