A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection
As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/11/1/63 |