Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing

Nitrogen-vacancy (NV) centers in diamond photonic nanostructures have attracted much attention as efficient single photon emitters and quantum bits. These quantum optical devices mostly require single or low-density NV centers doped in thin diamond membranes. In contrast, this study focuses on diamo...

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Main Authors: Hisashi Sumikura, Kazuyuki Hirama, Katsuhiko Nishiguchi, Akihiko Shinya, Masaya Notomi
Format: Article
Language:English
Published: AIP Publishing LLC 2020-03-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0001922
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author Hisashi Sumikura
Kazuyuki Hirama
Katsuhiko Nishiguchi
Akihiko Shinya
Masaya Notomi
author_facet Hisashi Sumikura
Kazuyuki Hirama
Katsuhiko Nishiguchi
Akihiko Shinya
Masaya Notomi
author_sort Hisashi Sumikura
collection DOAJ
description Nitrogen-vacancy (NV) centers in diamond photonic nanostructures have attracted much attention as efficient single photon emitters and quantum bits. These quantum optical devices mostly require single or low-density NV centers doped in thin diamond membranes. In contrast, this study focuses on diamond photonic nanostructures with a high concentration of NV centers to achieve a diamond color center laser with a sufficient gain available as a visible light source and a sensitive magnetic-field sensor. We employ high-dose helium ion implantation to type-Ib diamond substrates and thermal annealing, which enables us to obtain uniform thin diamond membranes containing a dense ensemble of NV centers. Luminescence spectroscopy reveals the kinetics of NV centers at high temperature from which we find an optimum annealing temperature maximizing the NV center emission while suppressing the transformation from NV to H3 centers. Furthermore, fine photonic nanowires are also successfully fabricated in the air-suspended diamond membrane, and they exhibit intense photoluminescence from the NV centers with a concentration as high as 7 × 1016 cm−3 (0.4 ppm). These results suggest a route to the fabrication of diamond photonic nanostructures containing a dense ensemble of NV centers, which can be a key material for developing diamond-based light emitting and magnetic-field sensing devices.
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spelling doaj.art-0e59c997465047dbb133140b0495ea7c2022-12-22T00:19:23ZengAIP Publishing LLCAPL Materials2166-532X2020-03-0183031113031113-710.1063/5.0001922Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealingHisashi Sumikura0Kazuyuki Hirama1Katsuhiko Nishiguchi2Akihiko Shinya3Masaya Notomi4NTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi, Kanagawa 243-0198, JapanNitrogen-vacancy (NV) centers in diamond photonic nanostructures have attracted much attention as efficient single photon emitters and quantum bits. These quantum optical devices mostly require single or low-density NV centers doped in thin diamond membranes. In contrast, this study focuses on diamond photonic nanostructures with a high concentration of NV centers to achieve a diamond color center laser with a sufficient gain available as a visible light source and a sensitive magnetic-field sensor. We employ high-dose helium ion implantation to type-Ib diamond substrates and thermal annealing, which enables us to obtain uniform thin diamond membranes containing a dense ensemble of NV centers. Luminescence spectroscopy reveals the kinetics of NV centers at high temperature from which we find an optimum annealing temperature maximizing the NV center emission while suppressing the transformation from NV to H3 centers. Furthermore, fine photonic nanowires are also successfully fabricated in the air-suspended diamond membrane, and they exhibit intense photoluminescence from the NV centers with a concentration as high as 7 × 1016 cm−3 (0.4 ppm). These results suggest a route to the fabrication of diamond photonic nanostructures containing a dense ensemble of NV centers, which can be a key material for developing diamond-based light emitting and magnetic-field sensing devices.http://dx.doi.org/10.1063/5.0001922
spellingShingle Hisashi Sumikura
Kazuyuki Hirama
Katsuhiko Nishiguchi
Akihiko Shinya
Masaya Notomi
Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
APL Materials
title Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
title_full Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
title_fullStr Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
title_full_unstemmed Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
title_short Highly nitrogen-vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
title_sort highly nitrogen vacancy doped diamond nanostructures fabricated by ion implantation and optimum annealing
url http://dx.doi.org/10.1063/5.0001922
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