Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS
The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechani...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/2/390 |
| _version_ | 1797619205899550720 |
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| author | Adir Krayden Dima Shlenkevitch Tanya Blank Sara Stolyarova Yael Nemirovsky |
| author_facet | Adir Krayden Dima Shlenkevitch Tanya Blank Sara Stolyarova Yael Nemirovsky |
| author_sort | Adir Krayden |
| collection | DOAJ |
| description | The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechanical system (CMOS-SOI-MEMS) technologies, and the result is a new pellistor-like sensor, dubbed GMOS, with integrated signal processing. In this study, we describe the performance of such sensors for the selective detection of mixtures of gases. The novel key ideas of this study are: (i) the use of the GMOS for gas sensing; (ii) applying the Kalman filter to improve the signal-to-noise ratio; (iii) adding artificial intelligence (AI) with tiny edge approach. |
| first_indexed | 2024-03-11T08:23:47Z |
| format | Article |
| id | doaj.art-0e69459b54a842f59aa65ce87191cda3 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T08:23:47Z |
| publishDate | 2023-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0e69459b54a842f59aa65ce87191cda32023-11-16T22:11:35ZengMDPI AGMicromachines2072-666X2023-02-0114239010.3390/mi14020390Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOSAdir Krayden0Dima Shlenkevitch1Tanya Blank2Sara Stolyarova3Yael Nemirovsky4Electrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 3200003, IsraelTodos Technologies, Kinneret 12 Street, Airport City 7019900, IsraelElectrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 3200003, IsraelElectrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 3200003, IsraelElectrical and Computer Engineering Department, Technion—Israel Institute of Technology, Haifa 3200003, IsraelThe need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechanical system (CMOS-SOI-MEMS) technologies, and the result is a new pellistor-like sensor, dubbed GMOS, with integrated signal processing. In this study, we describe the performance of such sensors for the selective detection of mixtures of gases. The novel key ideas of this study are: (i) the use of the GMOS for gas sensing; (ii) applying the Kalman filter to improve the signal-to-noise ratio; (iii) adding artificial intelligence (AI) with tiny edge approach.https://www.mdpi.com/2072-666X/14/2/390MEMSgas sensorSOIMOSdata analyticsclassification |
| spellingShingle | Adir Krayden Dima Shlenkevitch Tanya Blank Sara Stolyarova Yael Nemirovsky Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS Micromachines MEMS gas sensor SOI MOS data analytics classification |
| title | Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS |
| title_full | Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS |
| title_fullStr | Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS |
| title_full_unstemmed | Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS |
| title_short | Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS |
| title_sort | selective sensing of mixtures of gases with cmos soi mems sensor dubbed gmos |
| topic | MEMS gas sensor SOI MOS data analytics classification |
| url | https://www.mdpi.com/2072-666X/14/2/390 |
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