Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler
An optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a half-cone edge taper was designed. We optimized the...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/6/1268 |
| _version_ | 1827736346266959872 |
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| author | Shengtao Yu Xiaoyu Li Chengqun Gui |
| author_facet | Shengtao Yu Xiaoyu Li Chengqun Gui |
| author_sort | Shengtao Yu |
| collection | DOAJ |
| description | An optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a half-cone edge taper was designed. We optimized the structure of mirror curvature and taper through finite-difference-time-domain (FDTD) and ZEMAX simulation to achieve mode matching between SMF (single-mode fiber) and the optical coupler. The device was fabricated via laser-direct-writing 3D lithography, dry etching and deposition on a 3.5 µm silicon-on-insulator (SOI) platform. The test results show that the overall loss of the coupler and its connected waveguide at 1550 nm was 1.11 dB in transverse-electric (TE) mode and 2.25 dB in transverse-magnetic (TM) mode. |
| first_indexed | 2024-03-11T02:07:54Z |
| format | Article |
| id | doaj.art-0e860deeca214e509401e76f9805011a |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T02:07:54Z |
| publishDate | 2023-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0e860deeca214e509401e76f9805011a2023-11-18T11:40:42ZengMDPI AGMicromachines2072-666X2023-06-01146126810.3390/mi14061268Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical CouplerShengtao Yu0Xiaoyu Li1Chengqun Gui2School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaAn optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a half-cone edge taper was designed. We optimized the structure of mirror curvature and taper through finite-difference-time-domain (FDTD) and ZEMAX simulation to achieve mode matching between SMF (single-mode fiber) and the optical coupler. The device was fabricated via laser-direct-writing 3D lithography, dry etching and deposition on a 3.5 µm silicon-on-insulator (SOI) platform. The test results show that the overall loss of the coupler and its connected waveguide at 1550 nm was 1.11 dB in transverse-electric (TE) mode and 2.25 dB in transverse-magnetic (TM) mode.https://www.mdpi.com/2072-666X/14/6/12683Dpolarization independentSOIvertical optical couplerlaser-direct-writing lithography |
| spellingShingle | Shengtao Yu Xiaoyu Li Chengqun Gui Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler Micromachines 3D polarization independent SOI vertical optical coupler laser-direct-writing lithography |
| title | Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler |
| title_full | Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler |
| title_fullStr | Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler |
| title_full_unstemmed | Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler |
| title_short | Design and Manufacture of Polarization-Independent 3D SOI Vertical Optical Coupler |
| title_sort | design and manufacture of polarization independent 3d soi vertical optical coupler |
| topic | 3D polarization independent SOI vertical optical coupler laser-direct-writing lithography |
| url | https://www.mdpi.com/2072-666X/14/6/1268 |
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