Two-Beam Ultrafast Laser Scribing of Graphene Patterns with 90-nm Subdiffraction Feature Size
The fabrication of high-resolution laser-scribed graphene devices is crucial to achieving large surface areas and thus performance breakthroughs. However, since the investigation mainly focuses on the laser-induced reduction of graphene oxide, the single-beam scribing provides a tremendous challenge...
Main Authors: | Xi Chen, Min Gu |
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Format: | Article |
Language: | English |
Published: |
American Association for the Advancement of Science (AAAS)
2022-01-01
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Series: | Ultrafast Science |
Online Access: | https://spj.science.org/doi/10.34133/ultrafastscience.0001 |
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