Effect of 4He2+ ion irradiation on the optical, electrical, morphological, and structural properties of ZnO thin films
A study of the effect of 2.5 MeV ^4 He ^2+ ion irradiation on the optical, electrical, morphological and structural properties of ZnO thin films is presented. Polycrystalline zinc oxide thin films were deposited on soda lime glass substrates using the spray pyrolysis technique. During the process, t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2022-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/aca240 |