Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar
Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours....
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-11-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/16/11/1880 |
| _version_ | 1818015282686328832 |
|---|---|
| author | Wei Li Zhilin Feng Enwen Dai Jie Xu Gang Bai |
| author_facet | Wei Li Zhilin Feng Enwen Dai Jie Xu Gang Bai |
| author_sort | Wei Li |
| collection | DOAJ |
| description | Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids. |
| first_indexed | 2024-04-14T06:55:51Z |
| format | Article |
| id | doaj.art-0edcb29dce7a475bb6b27a98dbe27d90 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T06:55:51Z |
| publishDate | 2016-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-0edcb29dce7a475bb6b27a98dbe27d902022-12-22T02:06:54ZengMDPI AGSensors1424-82202016-11-011611188010.3390/s16111880s16111880Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon NanopillarWei Li0Zhilin Feng1Enwen Dai2Jie Xu3Gang Bai4State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaState-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, ChinaHere, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids.http://www.mdpi.com/1424-8220/16/11/1880ordered silicon nanopillarorganic vapourgas sensing |
| spellingShingle | Wei Li Zhilin Feng Enwen Dai Jie Xu Gang Bai Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar Sensors ordered silicon nanopillar organic vapour gas sensing |
| title | Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar |
| title_full | Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar |
| title_fullStr | Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar |
| title_full_unstemmed | Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar |
| title_short | Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar |
| title_sort | organic vapour sensing properties of area ordered and size controlled silicon nanopillar |
| topic | ordered silicon nanopillar organic vapour gas sensing |
| url | http://www.mdpi.com/1424-8220/16/11/1880 |
| work_keys_str_mv | AT weili organicvapoursensingpropertiesofareaorderedandsizecontrolledsiliconnanopillar AT zhilinfeng organicvapoursensingpropertiesofareaorderedandsizecontrolledsiliconnanopillar AT enwendai organicvapoursensingpropertiesofareaorderedandsizecontrolledsiliconnanopillar AT jiexu organicvapoursensingpropertiesofareaorderedandsizecontrolledsiliconnanopillar AT gangbai organicvapoursensingpropertiesofareaorderedandsizecontrolledsiliconnanopillar |