Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns

Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system...

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Main Authors: Jun-Uk Lee, Yong-Won Ma, Sung-Yeob Jeong, Bo-Sung Shin
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/5/476
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author Jun-Uk Lee
Yong-Won Ma
Sung-Yeob Jeong
Bo-Sung Shin
author_facet Jun-Uk Lee
Yong-Won Ma
Sung-Yeob Jeong
Bo-Sung Shin
author_sort Jun-Uk Lee
collection DOAJ
description Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored.
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spelling doaj.art-0f091371f84246dab7cd02baabf56c5c2023-11-19T23:10:05ZengMDPI AGMicromachines2072-666X2020-04-0111547610.3390/mi11050476Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene PatternsJun-Uk Lee0Yong-Won Ma1Sung-Yeob Jeong2Bo-Sung Shin3Department of Cogno Mechatronics Engineering, Pusan National University, Busan 46241, KoreaInterdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, KoreaInterdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, KoreaDepartment of Optics and Mechatronics Engineering, Pusan National University, Busan 46241, KoreaThree-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored.https://www.mdpi.com/2072-666X/11/5/4763-D porous structures of graphene (3-D PGS)laser induced graphene (LIG)laser direct writing (LDW)hair-likehumidity sensorpolyimide (PI)
spellingShingle Jun-Uk Lee
Yong-Won Ma
Sung-Yeob Jeong
Bo-Sung Shin
Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
Micromachines
3-D porous structures of graphene (3-D PGS)
laser induced graphene (LIG)
laser direct writing (LDW)
hair-like
humidity sensor
polyimide (PI)
title Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
title_full Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
title_fullStr Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
title_full_unstemmed Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
title_short Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
title_sort direct fabrication of ultra sensitive humidity sensor based on hair like laser induced graphene patterns
topic 3-D porous structures of graphene (3-D PGS)
laser induced graphene (LIG)
laser direct writing (LDW)
hair-like
humidity sensor
polyimide (PI)
url https://www.mdpi.com/2072-666X/11/5/476
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AT sungyeobjeong directfabricationofultrasensitivehumiditysensorbasedonhairlikelaserinducedgraphenepatterns
AT bosungshin directfabricationofultrasensitivehumiditysensorbasedonhairlikelaserinducedgraphenepatterns