Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns
Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system...
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MDPI AG
2020-04-01
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Series: | Micromachines |
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Online Access: | https://www.mdpi.com/2072-666X/11/5/476 |
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author | Jun-Uk Lee Yong-Won Ma Sung-Yeob Jeong Bo-Sung Shin |
author_facet | Jun-Uk Lee Yong-Won Ma Sung-Yeob Jeong Bo-Sung Shin |
author_sort | Jun-Uk Lee |
collection | DOAJ |
description | Three-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored. |
first_indexed | 2024-03-10T20:07:08Z |
format | Article |
id | doaj.art-0f091371f84246dab7cd02baabf56c5c |
institution | Directory Open Access Journal |
issn | 2072-666X |
language | English |
last_indexed | 2024-03-10T20:07:08Z |
publishDate | 2020-04-01 |
publisher | MDPI AG |
record_format | Article |
series | Micromachines |
spelling | doaj.art-0f091371f84246dab7cd02baabf56c5c2023-11-19T23:10:05ZengMDPI AGMicromachines2072-666X2020-04-0111547610.3390/mi11050476Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene PatternsJun-Uk Lee0Yong-Won Ma1Sung-Yeob Jeong2Bo-Sung Shin3Department of Cogno Mechatronics Engineering, Pusan National University, Busan 46241, KoreaInterdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, KoreaInterdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, KoreaDepartment of Optics and Mechatronics Engineering, Pusan National University, Busan 46241, KoreaThree-dimensional (3-D) porous graphitic structures have great potential for sensing applications due to their conductive carbon networks and large surface area. In this work, we present a method for facile fabrication of hair-like laser induced graphene (LIG) patterns using a laser scribing system equipped with a 355 nm pulsed laser. The polyimide (PI) film was positioned on a defocused plane and irradiated at a slow scanning speed using a misaligned laser beam. These patterns have the advantages of a large surface area and abundant oxidation groups. We have applied the hair-like LIG patterns to a humidity sensor. The humidity sensor showed good sensitivity characteristics and a large amount of electronic carriers can be stored.https://www.mdpi.com/2072-666X/11/5/4763-D porous structures of graphene (3-D PGS)laser induced graphene (LIG)laser direct writing (LDW)hair-likehumidity sensorpolyimide (PI) |
spellingShingle | Jun-Uk Lee Yong-Won Ma Sung-Yeob Jeong Bo-Sung Shin Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns Micromachines 3-D porous structures of graphene (3-D PGS) laser induced graphene (LIG) laser direct writing (LDW) hair-like humidity sensor polyimide (PI) |
title | Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns |
title_full | Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns |
title_fullStr | Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns |
title_full_unstemmed | Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns |
title_short | Direct Fabrication of Ultra-Sensitive Humidity Sensor Based on Hair-Like Laser-Induced Graphene Patterns |
title_sort | direct fabrication of ultra sensitive humidity sensor based on hair like laser induced graphene patterns |
topic | 3-D porous structures of graphene (3-D PGS) laser induced graphene (LIG) laser direct writing (LDW) hair-like humidity sensor polyimide (PI) |
url | https://www.mdpi.com/2072-666X/11/5/476 |
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