Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment
Abstract In this study, we experimentally demonstrate fabrication of ultra-smooth and crystalline barium titanate (BTO) films on magnesium oxide (MgO) substrates by engineering lattice strain and crystal structure via thermal treatment. We observe that oxygen-depleted deposition allows growth of hig...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2022-03-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-09182-0 |
| _version_ | 1819049920258113536 |
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| author | Bogyu Kim Young-Uk Jeon Chulwoo Lee In Soo Kim Byeong-Hyeon Lee Young-Hwan Kim Young Duck Kim Il Ki Han Kwanil Lee Jongbum Kim JoonHyun Kang |
| author_facet | Bogyu Kim Young-Uk Jeon Chulwoo Lee In Soo Kim Byeong-Hyeon Lee Young-Hwan Kim Young Duck Kim Il Ki Han Kwanil Lee Jongbum Kim JoonHyun Kang |
| author_sort | Bogyu Kim |
| collection | DOAJ |
| description | Abstract In this study, we experimentally demonstrate fabrication of ultra-smooth and crystalline barium titanate (BTO) films on magnesium oxide (MgO) substrates by engineering lattice strain and crystal structure via thermal treatment. We observe that oxygen-depleted deposition allows growth of highly strained BTO films on MgO substrates with crack-free surface. In addition, post-thermal treatment relaxes strain, resulting in an enhancement of ferroelectricity. Surface roughening of the BTO films caused by recrystallization during post-thermal treatment is controlled by chemical–mechanical polishing (CMP) to retain their initial ultra-smooth surfaces. From Raman spectroscopy, reciprocal space map (RSM), and capacitance–voltage (C–V) curve measurements, we confirm that the ferroelectricity of BTO films strongly depend on the relaxation of lattice strain and the phase transition from a-axis to c-axis oriented crystal structure. |
| first_indexed | 2024-12-21T11:39:49Z |
| format | Article |
| id | doaj.art-0f4803079e1e408099c9289f97d65340 |
| institution | Directory Open Access Journal |
| issn | 2045-2322 |
| language | English |
| last_indexed | 2024-12-21T11:39:49Z |
| publishDate | 2022-03-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj.art-0f4803079e1e408099c9289f97d653402022-12-21T19:05:20ZengNature PortfolioScientific Reports2045-23222022-03-011211710.1038/s41598-022-09182-0Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatmentBogyu Kim0Young-Uk Jeon1Chulwoo Lee2In Soo Kim3Byeong-Hyeon Lee4Young-Hwan Kim5Young Duck Kim6Il Ki Han7Kwanil Lee8Jongbum Kim9JoonHyun Kang10Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Advanced Analysis Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)KHU-KIST Department of Converging Science and Technology, Kyung Hee UniversityNanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Nanophotonics Research Center, Korea Institute of Science and Technology (KIST)Abstract In this study, we experimentally demonstrate fabrication of ultra-smooth and crystalline barium titanate (BTO) films on magnesium oxide (MgO) substrates by engineering lattice strain and crystal structure via thermal treatment. We observe that oxygen-depleted deposition allows growth of highly strained BTO films on MgO substrates with crack-free surface. In addition, post-thermal treatment relaxes strain, resulting in an enhancement of ferroelectricity. Surface roughening of the BTO films caused by recrystallization during post-thermal treatment is controlled by chemical–mechanical polishing (CMP) to retain their initial ultra-smooth surfaces. From Raman spectroscopy, reciprocal space map (RSM), and capacitance–voltage (C–V) curve measurements, we confirm that the ferroelectricity of BTO films strongly depend on the relaxation of lattice strain and the phase transition from a-axis to c-axis oriented crystal structure.https://doi.org/10.1038/s41598-022-09182-0 |
| spellingShingle | Bogyu Kim Young-Uk Jeon Chulwoo Lee In Soo Kim Byeong-Hyeon Lee Young-Hwan Kim Young Duck Kim Il Ki Han Kwanil Lee Jongbum Kim JoonHyun Kang Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment Scientific Reports |
| title | Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment |
| title_full | Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment |
| title_fullStr | Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment |
| title_full_unstemmed | Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment |
| title_short | Controlling of lattice strains for crack-free and strong ferroelectric barium titanate films by post-thermal treatment |
| title_sort | controlling of lattice strains for crack free and strong ferroelectric barium titanate films by post thermal treatment |
| url | https://doi.org/10.1038/s41598-022-09182-0 |
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