Translational MEMS Platform for Planar Optical Switching Fabrics
While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved,...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-06-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/7/435 |
| _version_ | 1818857845190295552 |
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| author | Suraj Sharma Niharika Kohli Jonathan Brière Michaël Ménard Frederic Nabki |
| author_facet | Suraj Sharma Niharika Kohli Jonathan Brière Michaël Ménard Frederic Nabki |
| author_sort | Suraj Sharma |
| collection | DOAJ |
| description | While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved, and the tight alignment tolerances between different components. In this work, we present a 2-D translational MEMS platform capable of highly efficient planar optical switching through integration with silicon nitride (SiN) based optical waveguides. The discrete lateral displacement provided by simple parallel plate actuators on opposite sides of the central platform enables switching between different input and output waveguides. The proposed structure can displace the central platform by 3.37 µm in two directions at an actuation voltage of 65 V. Additionally, the parallel plate actuator designed for closing completely the 4.26 µm air gap between the fixed and moving waveguides operates at just 50 V. Eigenmode expansion analysis shows over 99% butt-coupling efficiency the between the SiN waveguides when the gap is closed. Also, 2.5 finite-difference time-domain analysis demonstrates zero cross talk between two parallel SiN waveguides across the length of the platform for a 3.5 µm separation between adjacent waveguides enabling multiple waveguide configuration onto the platform. Different MEMS designs were simulated using static structural analysis in ANSYS. These designs were fabricated with a custom process by AEPONYX Inc. (Montreal, QC, Canada) and through the PiezoMUMPs process of MEMSCAP (Durham, NC, USA). |
| first_indexed | 2024-12-19T08:46:52Z |
| format | Article |
| id | doaj.art-0f8ec0c2c68c44e48bc26303394daac5 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-19T08:46:52Z |
| publishDate | 2019-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-0f8ec0c2c68c44e48bc26303394daac52022-12-21T20:28:47ZengMDPI AGMicromachines2072-666X2019-06-0110743510.3390/mi10070435mi10070435Translational MEMS Platform for Planar Optical Switching FabricsSuraj Sharma0Niharika Kohli1Jonathan Brière2Michaël Ménard3Frederic Nabki4Department of Electrical Engineering, Ecole de Technologie Supérieure, Montréal, QC H3C 1K3, CanadaDepartment of Electrical Engineering, Ecole de Technologie Supérieure, Montréal, QC H3C 1K3, CanadaAEPONYX Inc., Montréal, QC H3C 4J9, CanadaDepartment of Computer Science, Université du Québec à Montreal, Montréal, QC H2X 3Y7, CanadaDepartment of Electrical Engineering, Ecole de Technologie Supérieure, Montréal, QC H3C 1K3, CanadaWhile 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved, and the tight alignment tolerances between different components. In this work, we present a 2-D translational MEMS platform capable of highly efficient planar optical switching through integration with silicon nitride (SiN) based optical waveguides. The discrete lateral displacement provided by simple parallel plate actuators on opposite sides of the central platform enables switching between different input and output waveguides. The proposed structure can displace the central platform by 3.37 µm in two directions at an actuation voltage of 65 V. Additionally, the parallel plate actuator designed for closing completely the 4.26 µm air gap between the fixed and moving waveguides operates at just 50 V. Eigenmode expansion analysis shows over 99% butt-coupling efficiency the between the SiN waveguides when the gap is closed. Also, 2.5 finite-difference time-domain analysis demonstrates zero cross talk between two parallel SiN waveguides across the length of the platform for a 3.5 µm separation between adjacent waveguides enabling multiple waveguide configuration onto the platform. Different MEMS designs were simulated using static structural analysis in ANSYS. These designs were fabricated with a custom process by AEPONYX Inc. (Montreal, QC, Canada) and through the PiezoMUMPs process of MEMSCAP (Durham, NC, USA).https://www.mdpi.com/2072-666X/10/7/435microelectromechanical systems (MEMS)electrostatic actuatorparallel plate actuationoptical switchsilicon-on-insulator (SOI)micro-platformoptical waveguidesilicon nitride photonicsintegrated optics |
| spellingShingle | Suraj Sharma Niharika Kohli Jonathan Brière Michaël Ménard Frederic Nabki Translational MEMS Platform for Planar Optical Switching Fabrics Micromachines microelectromechanical systems (MEMS) electrostatic actuator parallel plate actuation optical switch silicon-on-insulator (SOI) micro-platform optical waveguide silicon nitride photonics integrated optics |
| title | Translational MEMS Platform for Planar Optical Switching Fabrics |
| title_full | Translational MEMS Platform for Planar Optical Switching Fabrics |
| title_fullStr | Translational MEMS Platform for Planar Optical Switching Fabrics |
| title_full_unstemmed | Translational MEMS Platform for Planar Optical Switching Fabrics |
| title_short | Translational MEMS Platform for Planar Optical Switching Fabrics |
| title_sort | translational mems platform for planar optical switching fabrics |
| topic | microelectromechanical systems (MEMS) electrostatic actuator parallel plate actuation optical switch silicon-on-insulator (SOI) micro-platform optical waveguide silicon nitride photonics integrated optics |
| url | https://www.mdpi.com/2072-666X/10/7/435 |
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