A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression

We present a high-performance capacitive accelerometer with a sub-µg noise limit and 1.2 kHz bandwidth for particle acceleration detection applications. The low noise of the accelerometer is achieved through a combination of device design optimization and operation under vacuum to reduce the effects...

Full description

Bibliographic Details
Main Authors: Zayed Ahmed, Charles Duruaku, Fatemeh Edalatfar, Mehrdad Moallem, Behraad Bahreyni
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Micromachines
Subjects:
high-performance accelerometers
resonance suppression
vacuum packaged accelerometer
negative derivative controller
Online Access:https://www.mdpi.com/2072-666X/14/6/1188

Internet

https://www.mdpi.com/2072-666X/14/6/1188

Similar Items