Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer

Investigation of germanium gate hydrogen-terminated (H-terminated) diamond field effect transistor (FET) with Al2O3 dielectric layer has been successfully performed. The device demonstrates a normally-on characteristics, whose maximum drain-source current density, threshold voltage, maximum transcon...

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Main Authors: Zhang Minghui, Wang Wei, Wen Feng, Lin Fang, Chen Genqiang, Wang Fei, He Shi, Wang Yanfeng, Fan Shuwei, Bu Renan, Min Tai, Yu Cui, Wang Hongxing
Format: Article
Language:English
Published: Taylor & Francis Group 2022-12-01
Series:Functional Diamond
Subjects:
Online Access:http://dx.doi.org/10.1080/26941112.2022.2159775
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author Zhang Minghui
Wang Wei
Wen Feng
Lin Fang
Chen Genqiang
Wang Fei
He Shi
Wang Yanfeng
Fan Shuwei
Bu Renan
Min Tai
Yu Cui
Wang Hongxing
author_facet Zhang Minghui
Wang Wei
Wen Feng
Lin Fang
Chen Genqiang
Wang Fei
He Shi
Wang Yanfeng
Fan Shuwei
Bu Renan
Min Tai
Yu Cui
Wang Hongxing
author_sort Zhang Minghui
collection DOAJ
description Investigation of germanium gate hydrogen-terminated (H-terminated) diamond field effect transistor (FET) with Al2O3 dielectric layer has been successfully performed. The device demonstrates a normally-on characteristics, whose maximum drain-source current density, threshold voltage, maximum transconductance, on/off ratio, subthreshold swing, capacitance, carrier density, saturation carrier mobility, fixed charge density and interface state density are of −37.3 mA/mm, 0.22 V, 6.42 mS/mm, 108, 134 mV/dec, 0.33 μF/cm2, 9.83 × 1012 cm−2, 97.9 cm2/V·s, 7.63 × 1012 cm−2 and 2.56 × 1012 cm−2·eV−1, respectively. This work is significant to the development of H-terminated diamond FET.
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spelling doaj.art-0fe7f312b12e46c4a6bfc6f484fdd1b72023-10-12T13:43:53ZengTaylor & Francis GroupFunctional Diamond2694-11202022-12-012125826210.1080/26941112.2022.21597752159775Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layerZhang Minghui0Wang Wei1Wen Feng2Lin Fang3Chen Genqiang4Wang Fei5He Shi6Wang Yanfeng7Fan Shuwei8Bu Renan9Min Tai10Yu Cui11Wang Hongxing12Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityState Key Laboratory for Mechanical Behavior of Materials, Center for Spintronics and Quantum System, School of Materials Science and Engineering, Xi’an Jiaotong UniversityNational Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research InstituteKey Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering, Xi’an Jiaotong UniversityInvestigation of germanium gate hydrogen-terminated (H-terminated) diamond field effect transistor (FET) with Al2O3 dielectric layer has been successfully performed. The device demonstrates a normally-on characteristics, whose maximum drain-source current density, threshold voltage, maximum transconductance, on/off ratio, subthreshold swing, capacitance, carrier density, saturation carrier mobility, fixed charge density and interface state density are of −37.3 mA/mm, 0.22 V, 6.42 mS/mm, 108, 134 mV/dec, 0.33 μF/cm2, 9.83 × 1012 cm−2, 97.9 cm2/V·s, 7.63 × 1012 cm−2 and 2.56 × 1012 cm−2·eV−1, respectively. This work is significant to the development of H-terminated diamond FET.http://dx.doi.org/10.1080/26941112.2022.2159775hydrogen-terminated diamondfield effect transistorgermanium
spellingShingle Zhang Minghui
Wang Wei
Wen Feng
Lin Fang
Chen Genqiang
Wang Fei
He Shi
Wang Yanfeng
Fan Shuwei
Bu Renan
Min Tai
Yu Cui
Wang Hongxing
Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
Functional Diamond
hydrogen-terminated diamond
field effect transistor
germanium
title Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
title_full Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
title_fullStr Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
title_full_unstemmed Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
title_short Germanium gate hydrogen-terminated diamond field effect transistor with Al2O3 dielectric layer
title_sort germanium gate hydrogen terminated diamond field effect transistor with al2o3 dielectric layer
topic hydrogen-terminated diamond
field effect transistor
germanium
url http://dx.doi.org/10.1080/26941112.2022.2159775
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