Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoe...
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/10/4/2675/ |
| _version_ | 1811305808352247808 |
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| author | Mao-Hsiung Chiang |
| author_facet | Mao-Hsiung Chiang |
| author_sort | Mao-Hsiung Chiang |
| collection | DOAJ |
| description | This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuators are implemented and verified experimentally. |
| first_indexed | 2024-04-13T08:31:57Z |
| format | Article |
| id | doaj.art-1090b7ea247b4a4fa6f4cc30007a5682 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:31:57Z |
| publishDate | 2010-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-1090b7ea247b4a4fa6f4cc30007a56822022-12-22T02:54:12ZengMDPI AGSensors1424-82202010-03-011042675269310.3390/s100402675Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer AccuracyMao-Hsiung ChiangThis study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuators are implemented and verified experimentally.http://www.mdpi.com/1424-8220/10/4/2675/pneumatic-piezoelectric hybrid actuatorpiezoelectricpneumaticposition controldecoupling self-organizing fuzzy sliding mode control and dual-input single-output |
| spellingShingle | Mao-Hsiung Chiang Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy Sensors pneumatic-piezoelectric hybrid actuator piezoelectric pneumatic position control decoupling self-organizing fuzzy sliding mode control and dual-input single-output |
| title | Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy |
| title_full | Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy |
| title_fullStr | Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy |
| title_full_unstemmed | Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy |
| title_short | Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy |
| title_sort | development of x y servo pneumatic piezoelectric hybrid actuators for position control with high response large stroke and nanometer accuracy |
| topic | pneumatic-piezoelectric hybrid actuator piezoelectric pneumatic position control decoupling self-organizing fuzzy sliding mode control and dual-input single-output |
| url | http://www.mdpi.com/1424-8220/10/4/2675/ |
| work_keys_str_mv | AT maohsiungchiang developmentofxyservopneumaticpiezoelectrichybridactuatorsforpositioncontrolwithhighresponselargestrokeandnanometeraccuracy |