Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoe...
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/10/4/2675/ |