Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes
A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/3/680 |
| Summary: | A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A comparative study between suspended and non-suspended devices highlights the advantages of using a suspended architecture. |
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| ISSN: | 1424-8220 |