A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode
Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, ant...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/12/1071 |
| _version_ | 1797546072735744000 |
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| author | Bo Jiang Yan Su Guowen Liu Lemin Zhang Fumin Liu |
| author_facet | Bo Jiang Yan Su Guowen Liu Lemin Zhang Fumin Liu |
| author_sort | Bo Jiang |
| collection | DOAJ |
| description | Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise. |
| first_indexed | 2024-03-10T14:23:55Z |
| format | Article |
| id | doaj.art-112e96652c1d4e94af65c11c5a7f2fcf |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T14:23:55Z |
| publishDate | 2020-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-112e96652c1d4e94af65c11c5a7f2fcf2023-11-20T23:05:57ZengMDPI AGMicromachines2072-666X2020-12-011112107110.3390/mi11121071A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant ModeBo Jiang0Yan Su1Guowen Liu2Lemin Zhang3Fumin Liu4School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, ChinaSchool of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, ChinaSchool of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310058, ChinaBeijing Institute of Aerospace Control Device, Beijing 100854, ChinaBeijing Institute of Aerospace Control Device, Beijing 100854, ChinaDisc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise.https://www.mdpi.com/2072-666X/11/12/1071MEMS devicegyroscopeouter-frame-anchorhigh-quality factor |
| spellingShingle | Bo Jiang Yan Su Guowen Liu Lemin Zhang Fumin Liu A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode Micromachines MEMS device gyroscope outer-frame-anchor high-quality factor |
| title | A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode |
| title_full | A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode |
| title_fullStr | A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode |
| title_full_unstemmed | A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode |
| title_short | A High Q-Factor Outer-Frame-Anchor Gyroscope Operating at First Resonant Mode |
| title_sort | high q factor outer frame anchor gyroscope operating at first resonant mode |
| topic | MEMS device gyroscope outer-frame-anchor high-quality factor |
| url | https://www.mdpi.com/2072-666X/11/12/1071 |
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