Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator
Abstract The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended micro...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-08-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-022-00425-8 |
| _version_ | 1817994099176767488 |
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| author | Mehdi Mollaie Daryani Tomás Manzaneque Jia Wei Murali Krishna Ghatkesar |
| author_facet | Mehdi Mollaie Daryani Tomás Manzaneque Jia Wei Murali Krishna Ghatkesar |
| author_sort | Mehdi Mollaie Daryani |
| collection | DOAJ |
| description | Abstract The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR. |
| first_indexed | 2024-04-14T01:48:27Z |
| format | Article |
| id | doaj.art-11ac7f0ba9a740e58954dacd0af4f156 |
| institution | Directory Open Access Journal |
| issn | 2055-7434 |
| language | English |
| last_indexed | 2024-04-14T01:48:27Z |
| publishDate | 2022-08-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj.art-11ac7f0ba9a740e58954dacd0af4f1562022-12-22T02:19:27ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342022-08-018111010.1038/s41378-022-00425-8Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonatorMehdi Mollaie Daryani0Tomás Manzaneque1Jia Wei2Murali Krishna Ghatkesar3Department of Precision and Microsystems Engineering, Delft University of TechnologyDepartment of Precision and Microsystems Engineering, Delft University of TechnologyDepartment of Microelectronics, Delft University of TechnologyDepartment of Precision and Microsystems Engineering, Delft University of TechnologyAbstract The use of nanoparticles has been growing in various industrial fields, and concerns about their effects on health and the environment have been increasing. Hence, characterization techniques for nanoparticles are essential. Here, we present a silicon dioxide microfabricated suspended microchannel resonator (SMR) to measure the mass and concentration of nanoparticles in a liquid as they flow. We measured the mass detection limits of the device using laser Doppler vibrometry. This limit reached a minimum of 377 ag that correspond to a 34 nm diameter gold nanoparticle or a 243 nm diameter polystyrene particle, when sampled every 30 ms. We compared the fundamental limits of the measured data with an ideal noiseless measurement of the SMR. Finally, we measured the buoyant mass of gold nanoparticles in real-time as they flowed through the SMR.https://doi.org/10.1038/s41378-022-00425-8 |
| spellingShingle | Mehdi Mollaie Daryani Tomás Manzaneque Jia Wei Murali Krishna Ghatkesar Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator Microsystems & Nanoengineering |
| title | Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| title_full | Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| title_fullStr | Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| title_full_unstemmed | Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| title_short | Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| title_sort | measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator |
| url | https://doi.org/10.1038/s41378-022-00425-8 |
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