(Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering

The paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on...

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Bibliographic Details
Main Authors: Alexander Grenadyorov, Vladimir Oskirko, Alexander Zakharov, Konstantin Oskomov, Andrey Solovyev
Format: Article
Language:English
Published: MDPI AG 2022-11-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/22/8237
Description
Summary:The paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnetrons. It is shown that the higher Al content in the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating improves its hardness from 17 to 28 GPa. Regardless of the Al content, the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating manifests a low wear rate, namely (4.1–7.8) × 10<sup>−9</sup> and (3.9–5.3) × 10<sup>−7</sup> mm<sup>3</sup>N<sup>−1</sup>m<sup>−1</sup> in using metallic (100Cr6) and ceramic (Al<sub>2</sub>O<sub>3</sub>) counter bodies, respectively. In addition, this coating possesses the friction coefficient 0.4–0.7 and adhesive strength quality HF1 and HF2 indicating good interfacial adhesion according to the Daimler-Benz Rockwell-C adhesion test.
ISSN:1996-1944