(Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering
The paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/15/22/8237 |
| _version_ | 1797464668909862912 |
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| author | Alexander Grenadyorov Vladimir Oskirko Alexander Zakharov Konstantin Oskomov Andrey Solovyev |
| author_facet | Alexander Grenadyorov Vladimir Oskirko Alexander Zakharov Konstantin Oskomov Andrey Solovyev |
| author_sort | Alexander Grenadyorov |
| collection | DOAJ |
| description | The paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnetrons. It is shown that the higher Al content in the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating improves its hardness from 17 to 28 GPa. Regardless of the Al content, the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating manifests a low wear rate, namely (4.1–7.8) × 10<sup>−9</sup> and (3.9–5.3) × 10<sup>−7</sup> mm<sup>3</sup>N<sup>−1</sup>m<sup>−1</sup> in using metallic (100Cr6) and ceramic (Al<sub>2</sub>O<sub>3</sub>) counter bodies, respectively. In addition, this coating possesses the friction coefficient 0.4–0.7 and adhesive strength quality HF1 and HF2 indicating good interfacial adhesion according to the Daimler-Benz Rockwell-C adhesion test. |
| first_indexed | 2024-03-09T18:11:28Z |
| format | Article |
| id | doaj.art-11b09217f8ec49a6bed5e27ff5e5bb19 |
| institution | Directory Open Access Journal |
| issn | 1996-1944 |
| language | English |
| last_indexed | 2024-03-09T18:11:28Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Materials |
| spelling | doaj.art-11b09217f8ec49a6bed5e27ff5e5bb192023-11-24T09:06:23ZengMDPI AGMaterials1996-19442022-11-011522823710.3390/ma15228237(Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron SputteringAlexander Grenadyorov0Vladimir Oskirko1Alexander Zakharov2Konstantin Oskomov3Andrey Solovyev4The Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, RussiaThe Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, RussiaThe Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, RussiaThe Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, RussiaThe Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055 Tomsk, RussiaThe paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on the substrate position relative to magnetrons. It is shown that the higher Al content in the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating improves its hardness from 17 to 28 GPa. Regardless of the Al content, the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating manifests a low wear rate, namely (4.1–7.8) × 10<sup>−9</sup> and (3.9–5.3) × 10<sup>−7</sup> mm<sup>3</sup>N<sup>−1</sup>m<sup>−1</sup> in using metallic (100Cr6) and ceramic (Al<sub>2</sub>O<sub>3</sub>) counter bodies, respectively. In addition, this coating possesses the friction coefficient 0.4–0.7 and adhesive strength quality HF1 and HF2 indicating good interfacial adhesion according to the Daimler-Benz Rockwell-C adhesion test.https://www.mdpi.com/1996-1944/15/22/8237CrAlN coatinghardnesswear resistancedual-HiPIMS with short pulses100Cr6 counter bodyAl<sub>2</sub>O<sub>3</sub> counter body |
| spellingShingle | Alexander Grenadyorov Vladimir Oskirko Alexander Zakharov Konstantin Oskomov Andrey Solovyev (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering Materials CrAlN coating hardness wear resistance dual-HiPIMS with short pulses 100Cr6 counter body Al<sub>2</sub>O<sub>3</sub> counter body |
| title | (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering |
| title_full | (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering |
| title_fullStr | (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering |
| title_full_unstemmed | (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering |
| title_short | (Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering |
| title_sort | cr sub 1 x sub al sub x sub n coating deposition by short pulse high power dual magnetron sputtering |
| topic | CrAlN coating hardness wear resistance dual-HiPIMS with short pulses 100Cr6 counter body Al<sub>2</sub>O<sub>3</sub> counter body |
| url | https://www.mdpi.com/1996-1944/15/22/8237 |
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