(Cr<sub>1−x</sub>Al<sub>x</sub>)N Coating Deposition by Short-Pulse High-Power Dual Magnetron Sputtering
The paper deals with the (Cr<sub>1−x</sub>Al<sub>x</sub>)N coating containing 17 to 54 % Al which is deposited on AISI 430 stainless steel stationary substrates by short-pulse high-power dual magnetron sputtering of Al and Cr targets. The Al/Cr ratio in the coating depends on...
Main Authors: | Alexander Grenadyorov, Vladimir Oskirko, Alexander Zakharov, Konstantin Oskomov, Andrey Solovyev |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-11-01
|
Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/15/22/8237 |
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