Criterion for Selective Area Growth of III-V Nanowires

A model for the nucleation of vertical or planar III-V nanowires (NWs) in selective area growth (SAG) on masked substrates with regular arrays of openings is developed. The optimal SAG zone, with NW nucleation within the openings and the absence of parasitic III-V crystallites or group III droplets...

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Main Author: Vladimir G. Dubrovskii
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/20/3698
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author Vladimir G. Dubrovskii
author_facet Vladimir G. Dubrovskii
author_sort Vladimir G. Dubrovskii
collection DOAJ
description A model for the nucleation of vertical or planar III-V nanowires (NWs) in selective area growth (SAG) on masked substrates with regular arrays of openings is developed. The optimal SAG zone, with NW nucleation within the openings and the absence of parasitic III-V crystallites or group III droplets on the mask, is established, taking into account the minimum chemical potential of the III-V pairs required for nucleation on different surfaces, and the surface diffusion of the group III adatoms. The SAG maps are plotted in terms of the material fluxes versus the temperature. The non-trivial behavior of the SAG window, with the opening size and pitch, is analyzed, depending on the direction of the diffusion flux of the group III adatoms into or from the openings. A good correlation of the model with the data on the SAG of vertical GaN NWs and planar GaAs and InAs NWs by molecular beam epitaxy (MBE) is demonstrated.
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spelling doaj.art-11cd34ba67794f8f87b2e37092e9ca332023-11-24T01:42:07ZengMDPI AGNanomaterials2079-49912022-10-011220369810.3390/nano12203698Criterion for Selective Area Growth of III-V NanowiresVladimir G. Dubrovskii0Faculty of Physics, St. Petersburg State University, Universitetskaya Emb. 13B, 199034 St. Petersburg, RussiaA model for the nucleation of vertical or planar III-V nanowires (NWs) in selective area growth (SAG) on masked substrates with regular arrays of openings is developed. The optimal SAG zone, with NW nucleation within the openings and the absence of parasitic III-V crystallites or group III droplets on the mask, is established, taking into account the minimum chemical potential of the III-V pairs required for nucleation on different surfaces, and the surface diffusion of the group III adatoms. The SAG maps are plotted in terms of the material fluxes versus the temperature. The non-trivial behavior of the SAG window, with the opening size and pitch, is analyzed, depending on the direction of the diffusion flux of the group III adatoms into or from the openings. A good correlation of the model with the data on the SAG of vertical GaN NWs and planar GaAs and InAs NWs by molecular beam epitaxy (MBE) is demonstrated.https://www.mdpi.com/2079-4991/12/20/3698selective area growthpatterned substratesopeningsgroup III adatomssurface diffusion
spellingShingle Vladimir G. Dubrovskii
Criterion for Selective Area Growth of III-V Nanowires
Nanomaterials
selective area growth
patterned substrates
openings
group III adatoms
surface diffusion
title Criterion for Selective Area Growth of III-V Nanowires
title_full Criterion for Selective Area Growth of III-V Nanowires
title_fullStr Criterion for Selective Area Growth of III-V Nanowires
title_full_unstemmed Criterion for Selective Area Growth of III-V Nanowires
title_short Criterion for Selective Area Growth of III-V Nanowires
title_sort criterion for selective area growth of iii v nanowires
topic selective area growth
patterned substrates
openings
group III adatoms
surface diffusion
url https://www.mdpi.com/2079-4991/12/20/3698
work_keys_str_mv AT vladimirgdubrovskii criterionforselectiveareagrowthofiiivnanowires