Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy
The undamaged and damaged areas of the ITO thin film deposited on a silicon substrate induced by laser with different energies were tested with the transmission terahertz time-domain spectroscopy system. Their time-domain spectra and frequency-domain spectra of 0.4–1.0 THz were obtained, and the dif...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2022-10-01
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| Series: | Frontiers in Physics |
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| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.1046919/full |
| _version_ | 1811336000304054272 |
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| author | Xiaoyan Shang Wei Shi Junhong Su Chengang Dong |
| author_facet | Xiaoyan Shang Wei Shi Junhong Su Chengang Dong |
| author_sort | Xiaoyan Shang |
| collection | DOAJ |
| description | The undamaged and damaged areas of the ITO thin film deposited on a silicon substrate induced by laser with different energies were tested with the transmission terahertz time-domain spectroscopy system. Their time-domain spectra and frequency-domain spectra of 0.4–1.0 THz were obtained, and the differences were analyzed between the undamaged and damaged areas in these two spectra. The results show that the peak-to-peak value in the time domain and the amplitude in the frequency domain of the damaged area evidently increased compared with those of the undamaged area, and with the increase in laser-induced energy, resulting in the larger damaged area and heavier surface roughness, these two parameters gradually decrease. For the damaged area of the ITO thin film with the undamaged substrate, the refractive index and absorption coefficient are lower than those of the undamaged area. Therefore, the variation in the terahertz time-domain and frequency-domain spectra could be utilized to distinguish the damage of the optical thin film irradiated by laser, which provides a new approach for the laser-induced damage identification and the technical support in effect of the laser-induced damage on the properties of the optical thin film element in the terahertz band. |
| first_indexed | 2024-04-13T17:32:59Z |
| format | Article |
| id | doaj.art-120c93c1cc2a4921a16277e1a625d2d0 |
| institution | Directory Open Access Journal |
| issn | 2296-424X |
| language | English |
| last_indexed | 2024-04-13T17:32:59Z |
| publishDate | 2022-10-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Physics |
| spelling | doaj.art-120c93c1cc2a4921a16277e1a625d2d02022-12-22T02:37:30ZengFrontiers Media S.A.Frontiers in Physics2296-424X2022-10-011010.3389/fphy.2022.10469191046919Study on the laser-induced damage of thin films by terahertz time-domain spectroscopyXiaoyan Shang0Wei Shi1Junhong Su2Chengang Dong3School of Optoelectronic Engineering, Xi’an Technological University, Xi’an, Shaanxi, ChinaFaculty of Science, Xi’an University of Technology, Xi’an, Shaanxi, ChinaSchool of Optoelectronic Engineering, Xi’an Technological University, Xi’an, Shaanxi, ChinaSchool of Physics and Electrical Engineering, Weinan Normal University, Weinan, Shaanxi, ChinaThe undamaged and damaged areas of the ITO thin film deposited on a silicon substrate induced by laser with different energies were tested with the transmission terahertz time-domain spectroscopy system. Their time-domain spectra and frequency-domain spectra of 0.4–1.0 THz were obtained, and the differences were analyzed between the undamaged and damaged areas in these two spectra. The results show that the peak-to-peak value in the time domain and the amplitude in the frequency domain of the damaged area evidently increased compared with those of the undamaged area, and with the increase in laser-induced energy, resulting in the larger damaged area and heavier surface roughness, these two parameters gradually decrease. For the damaged area of the ITO thin film with the undamaged substrate, the refractive index and absorption coefficient are lower than those of the undamaged area. Therefore, the variation in the terahertz time-domain and frequency-domain spectra could be utilized to distinguish the damage of the optical thin film irradiated by laser, which provides a new approach for the laser-induced damage identification and the technical support in effect of the laser-induced damage on the properties of the optical thin film element in the terahertz band.https://www.frontiersin.org/articles/10.3389/fphy.2022.1046919/fullterahertz spectrumITO thin filmlaser-induced damageabsorption coefficientrefractive indexdamage identification |
| spellingShingle | Xiaoyan Shang Wei Shi Junhong Su Chengang Dong Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy Frontiers in Physics terahertz spectrum ITO thin film laser-induced damage absorption coefficient refractive index damage identification |
| title | Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy |
| title_full | Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy |
| title_fullStr | Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy |
| title_full_unstemmed | Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy |
| title_short | Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy |
| title_sort | study on the laser induced damage of thin films by terahertz time domain spectroscopy |
| topic | terahertz spectrum ITO thin film laser-induced damage absorption coefficient refractive index damage identification |
| url | https://www.frontiersin.org/articles/10.3389/fphy.2022.1046919/full |
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