Study on the laser-induced damage of thin films by terahertz time-domain spectroscopy
The undamaged and damaged areas of the ITO thin film deposited on a silicon substrate induced by laser with different energies were tested with the transmission terahertz time-domain spectroscopy system. Their time-domain spectra and frequency-domain spectra of 0.4–1.0 THz were obtained, and the dif...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-10-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.1046919/full |