Nitrogen-Related Defects in Crystalline Silicon

Defects and impurities play a fundamental role in semiconductors affecting their mechanical, optical, and electronic properties. Nitrogen (N) impurities are almost always present in a silicon (Si) lattice, either unintentionally, due to the growth and processing procedures, or intentionally, as a re...

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Main Authors: E. N. Sgourou, N. Sarlis, A. Chroneos, C. A. Londos
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/14/4/1631
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author E. N. Sgourou
N. Sarlis
A. Chroneos
C. A. Londos
author_facet E. N. Sgourou
N. Sarlis
A. Chroneos
C. A. Londos
author_sort E. N. Sgourou
collection DOAJ
description Defects and impurities play a fundamental role in semiconductors affecting their mechanical, optical, and electronic properties. Nitrogen (N) impurities are almost always present in a silicon (Si) lattice, either unintentionally, due to the growth and processing procedures, or intentionally, as a result of implantation. Nitrogen forms complexes with intrinsic defects (i.e., vacancies and self-interstitials) as well as with other impurities present in the Si lattice such as oxygen and carbon. It is, therefore, necessary to investigate and understand nitrogen-related defects, especially their structures, their energies, and their interaction with intrinsic point defects and impurities. The present review is focused on nitrogen-related defects (for example N<sub>i</sub>, N<sub>s</sub>, N<sub>i</sub>N<sub>i</sub>, N<sub>i</sub>N<sub>s</sub>, N<sub>s</sub>N<sub>s</sub>); nitrogen–self-interstitial and nitrogen-vacancy-related complexes (for example N<sub>s</sub>V, (N<sub>i</sub>N<sub>i</sub>)Si<sub>i</sub>, (N<sub>s</sub>N<sub>s</sub>)V); nitrogen–oxygen defects (for example NO, NO<sub>2</sub>, N<sub>2</sub>O, N<sub>2</sub>O<sub>2</sub>); more extended clusters such as V<sub>m</sub>N<sub>2</sub>O<sub>n</sub> (m, n = 1, 2); and nitrogen–carbon defects (for example C<sub>i</sub>N and C<sub>i</sub>NO). Both experimental and theoretical investigations are considered as they provide complementary information.
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spelling doaj.art-121205dbffb94c059bd0112b5ca688a02024-02-23T15:06:36ZengMDPI AGApplied Sciences2076-34172024-02-01144163110.3390/app14041631Nitrogen-Related Defects in Crystalline SiliconE. N. Sgourou0N. Sarlis1A. Chroneos2C. A. Londos3Section of Condensed Matter Physics, Department of Physics, National and Kapodistrian University of Athens, Panepistimiopolis Zografos, 15784 Athens, GreeceSection of Condensed Matter Physics, Department of Physics, National and Kapodistrian University of Athens, Panepistimiopolis Zografos, 15784 Athens, GreeceDepartment of Electrical and Computer Engineering, University of Thessaly, 38333 Volos, GreeceSection of Condensed Matter Physics, Department of Physics, National and Kapodistrian University of Athens, Panepistimiopolis Zografos, 15784 Athens, GreeceDefects and impurities play a fundamental role in semiconductors affecting their mechanical, optical, and electronic properties. Nitrogen (N) impurities are almost always present in a silicon (Si) lattice, either unintentionally, due to the growth and processing procedures, or intentionally, as a result of implantation. Nitrogen forms complexes with intrinsic defects (i.e., vacancies and self-interstitials) as well as with other impurities present in the Si lattice such as oxygen and carbon. It is, therefore, necessary to investigate and understand nitrogen-related defects, especially their structures, their energies, and their interaction with intrinsic point defects and impurities. The present review is focused on nitrogen-related defects (for example N<sub>i</sub>, N<sub>s</sub>, N<sub>i</sub>N<sub>i</sub>, N<sub>i</sub>N<sub>s</sub>, N<sub>s</sub>N<sub>s</sub>); nitrogen–self-interstitial and nitrogen-vacancy-related complexes (for example N<sub>s</sub>V, (N<sub>i</sub>N<sub>i</sub>)Si<sub>i</sub>, (N<sub>s</sub>N<sub>s</sub>)V); nitrogen–oxygen defects (for example NO, NO<sub>2</sub>, N<sub>2</sub>O, N<sub>2</sub>O<sub>2</sub>); more extended clusters such as V<sub>m</sub>N<sub>2</sub>O<sub>n</sub> (m, n = 1, 2); and nitrogen–carbon defects (for example C<sub>i</sub>N and C<sub>i</sub>NO). Both experimental and theoretical investigations are considered as they provide complementary information.https://www.mdpi.com/2076-3417/14/4/1631siliconnitrogenintrinsic defects
spellingShingle E. N. Sgourou
N. Sarlis
A. Chroneos
C. A. Londos
Nitrogen-Related Defects in Crystalline Silicon
Applied Sciences
silicon
nitrogen
intrinsic defects
title Nitrogen-Related Defects in Crystalline Silicon
title_full Nitrogen-Related Defects in Crystalline Silicon
title_fullStr Nitrogen-Related Defects in Crystalline Silicon
title_full_unstemmed Nitrogen-Related Defects in Crystalline Silicon
title_short Nitrogen-Related Defects in Crystalline Silicon
title_sort nitrogen related defects in crystalline silicon
topic silicon
nitrogen
intrinsic defects
url https://www.mdpi.com/2076-3417/14/4/1631
work_keys_str_mv AT ensgourou nitrogenrelateddefectsincrystallinesilicon
AT nsarlis nitrogenrelateddefectsincrystallinesilicon
AT achroneos nitrogenrelateddefectsincrystallinesilicon
AT calondos nitrogenrelateddefectsincrystallinesilicon