Effects of the crystallization parameters on the fabrication of ultrathin capacitors of PbTiO<sub>3</sub>
Ultrathin ferroelectric films have interesting potential applications, for example, as transducer elements of nanoelectromechanical systems (NEMS). However, to be integrated in devices, several problems related to their preparation must be solved. In this work we focus on the fabrication of function...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2010-02-01
|
| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/14/13 |