Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation
We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/4/66 |
| _version_ | 1818980599988224000 |
|---|---|
| author | Carlos Angulo Barrios Víctor Canalejas-Tejero |
| author_facet | Carlos Angulo Barrios Víctor Canalejas-Tejero |
| author_sort | Carlos Angulo Barrios |
| collection | DOAJ |
| description | We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces. |
| first_indexed | 2024-12-20T17:18:00Z |
| format | Article |
| id | doaj.art-137ed16fa60b4255a55d9c303b42d762 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-20T17:18:00Z |
| publishDate | 2016-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-137ed16fa60b4255a55d9c303b42d7622022-12-21T19:31:56ZengMDPI AGMicromachines2072-666X2016-04-01746610.3390/mi7040066mi7040066Micro-Shaping of Nanopatterned Surfaces by Electron Beam IrradiationCarlos Angulo Barrios0Víctor Canalejas-Tejero1Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM), ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, SpainInstituto de Sistemas Optoelectrónicos y Microtecnología (ISOM), ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, SpainWe show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces.http://www.mdpi.com/2072-666X/7/4/66micro/nanopatterningelectron-beam lithographypolycarbonatecompact diskmicro-opticsmicrofluidicslab-on-CD |
| spellingShingle | Carlos Angulo Barrios Víctor Canalejas-Tejero Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation Micromachines micro/nanopatterning electron-beam lithography polycarbonate compact disk micro-optics microfluidics lab-on-CD |
| title | Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation |
| title_full | Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation |
| title_fullStr | Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation |
| title_full_unstemmed | Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation |
| title_short | Micro-Shaping of Nanopatterned Surfaces by Electron Beam Irradiation |
| title_sort | micro shaping of nanopatterned surfaces by electron beam irradiation |
| topic | micro/nanopatterning electron-beam lithography polycarbonate compact disk micro-optics microfluidics lab-on-CD |
| url | http://www.mdpi.com/2072-666X/7/4/66 |
| work_keys_str_mv | AT carlosangulobarrios microshapingofnanopatternedsurfacesbyelectronbeamirradiation AT victorcanalejastejero microshapingofnanopatternedsurfacesbyelectronbeamirradiation |