A review of silicon subwavelength gratings: building break-through devices with anisotropic metamaterials
Silicon photonics is playing a key role in areas as diverse as high-speed optical communications, neural networks, supercomputing, quantum photonics, and sensing, which demand the development of highly efficient and compact light-processing devices. The lithographic segmentation of silicon waveguide...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2021-08-01
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Series: | Nanophotonics |
Subjects: | |
Online Access: | https://doi.org/10.1515/nanoph-2021-0110 |