Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception
Abstract Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be res...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2023-05-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202206807 |
| _version_ | 1797825227292409856 |
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| author | Chunyu Lv Chengcheng Tian Jiashun Jiang Yu Dang Yang Liu Xuexin Duan Quanning Li Xuejiao Chen Mengying Xie |
| author_facet | Chunyu Lv Chengcheng Tian Jiashun Jiang Yu Dang Yang Liu Xuexin Duan Quanning Li Xuejiao Chen Mengying Xie |
| author_sort | Chunyu Lv |
| collection | DOAJ |
| description | Abstract Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa−1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor monitors subtle physiological signals such as various arterial pulses and respiration. This sensor is further integrated into a fully multimaterial 3D‐printed soft pneumatic finger to realize material hardness perception. Eight materials with different hardness values are successfully discriminated, and the capacitance of the sensor varies linearly (R2 > 0.975) with increasing hardness. Moreover, the sensitivity to the material hardness can be tuned by controlling the inflation pressure of the soft finger. As a proof of concept, the finger is used to discriminate pork fats with different hardness, paving the way for hardness discrimination in clinical palpation. |
| first_indexed | 2024-03-13T10:50:55Z |
| format | Article |
| id | doaj.art-14cfd62aa9fa4459a9baec080a3013cf |
| institution | Directory Open Access Journal |
| issn | 2198-3844 |
| language | English |
| last_indexed | 2024-03-13T10:50:55Z |
| publishDate | 2023-05-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Science |
| spelling | doaj.art-14cfd62aa9fa4459a9baec080a3013cf2023-05-17T13:02:05ZengWileyAdvanced Science2198-38442023-05-011014n/an/a10.1002/advs.202206807Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile PerceptionChunyu Lv0Chengcheng Tian1Jiashun Jiang2Yu Dang3Yang Liu4Xuexin Duan5Quanning Li6Xuejiao Chen7Mengying Xie8State Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaCollege of Artificial Intelligence Nankai University Tianjin 300350 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaState Key Laboratory of Precision Measuring Technology and Instrument School of Precision Instrument and Opto‐electronics Engineering Tianjin 300072 P. R. ChinaAbstract Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa−1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor monitors subtle physiological signals such as various arterial pulses and respiration. This sensor is further integrated into a fully multimaterial 3D‐printed soft pneumatic finger to realize material hardness perception. Eight materials with different hardness values are successfully discriminated, and the capacitance of the sensor varies linearly (R2 > 0.975) with increasing hardness. Moreover, the sensitivity to the material hardness can be tuned by controlling the inflation pressure of the soft finger. As a proof of concept, the finger is used to discriminate pork fats with different hardness, paving the way for hardness discrimination in clinical palpation.https://doi.org/10.1002/advs.202206807hardness discriminationphysiological signal monitoringpressure sensorssoft pneumatic fingerspontaneous microstructurestactile perception |
| spellingShingle | Chunyu Lv Chengcheng Tian Jiashun Jiang Yu Dang Yang Liu Xuexin Duan Quanning Li Xuejiao Chen Mengying Xie Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception Advanced Science hardness discrimination physiological signal monitoring pressure sensors soft pneumatic finger spontaneous microstructures tactile perception |
| title | Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception |
| title_full | Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception |
| title_fullStr | Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception |
| title_full_unstemmed | Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception |
| title_short | Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception |
| title_sort | ultrasensitive linear capacitive pressure sensor with wrinkled microstructures for tactile perception |
| topic | hardness discrimination physiological signal monitoring pressure sensors soft pneumatic finger spontaneous microstructures tactile perception |
| url | https://doi.org/10.1002/advs.202206807 |
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