Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency
Objectives : Manufacturing－based production facilities are required to install dust collection devices for air pollution prevention facilities. In particular, manufacturing-based companies need low-power hazardous gas treatment devices. However, due to the slowing economic growth, the cost of replac...
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| Format: | Article |
| Language: | English |
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Korean Society of Environmental Engineers
2021-02-01
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| Series: | 대한환경공학회지 |
| Subjects: | |
| Online Access: | http://www.jksee.or.kr/journal/view.php?number=4313 |
| _version_ | 1818725470879875072 |
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| author | Dong Sub Lee Jin Hee Kim |
| author_facet | Dong Sub Lee Jin Hee Kim |
| author_sort | Dong Sub Lee |
| collection | DOAJ |
| description | Objectives : Manufacturing－based production facilities are required to install dust collection devices for air pollution prevention facilities. In particular, manufacturing-based companies need low-power hazardous gas treatment devices. However, due to the slowing economic growth, the cost of replacing new hazardous gas treatment devices is increasing, and new products in the form of parts that can be attached to scrubbers that are already installed are urgently needed.
Methods : To deal with residual gas from organic and inorganic compounds used in semiconductor manufacturing processes, the concentration of air pollutants emitted through the process of removing harmful substances from the primary scrubber and re-treatment of gases emitted from the secondary scrubber is further lowered.
Results and Discussion : In this study, a cooling block device which is a hazardous gas treatment part is developed to solve the limitation of scrubber processing capacity from overcapacity harmful gases such as strong toxicity, corrosivity, combustion, and environmental pollution in semiconductor manufacturing process.
Conclusions : In the design factors and performance survey of cooling module using thermoelectric element, it was calculated that the cooling capacity of the peltier thermoelectric element with a margin of 9,300 W was required. Based on these results, the absolute humidity decreased by 5.8 g/kg and the temperature decreased by 9.5 degrees, showing the possibility of solving the problem of the decrease in the effectiveness of hazardous gas treatment of secondary scrubber due to increased moisture. |
| first_indexed | 2024-12-17T21:42:50Z |
| format | Article |
| id | doaj.art-150ddb4d057547bd9ce63f2f4697a114 |
| institution | Directory Open Access Journal |
| issn | 1225-5025 2383-7810 |
| language | English |
| last_indexed | 2024-12-17T21:42:50Z |
| publishDate | 2021-02-01 |
| publisher | Korean Society of Environmental Engineers |
| record_format | Article |
| series | 대한환경공학회지 |
| spelling | doaj.art-150ddb4d057547bd9ce63f2f4697a1142022-12-21T21:31:33ZengKorean Society of Environmental Engineers대한환경공학회지1225-50252383-78102021-02-01432110116https://doi.org/10.4491/KSEE.2021.43.2.110Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment EfficiencyDong Sub Lee0https://orcid.org/0000-0001-7053-978XJin Hee Kim1https://orcid.org/0000-0001-8496-4269Department of Healthcare & Biotechnology, Kyungwoon UniversityDepartment of Healthcare & Biotechnology, Kyungwoon UniversityObjectives : Manufacturing－based production facilities are required to install dust collection devices for air pollution prevention facilities. In particular, manufacturing-based companies need low-power hazardous gas treatment devices. However, due to the slowing economic growth, the cost of replacing new hazardous gas treatment devices is increasing, and new products in the form of parts that can be attached to scrubbers that are already installed are urgently needed. Methods : To deal with residual gas from organic and inorganic compounds used in semiconductor manufacturing processes, the concentration of air pollutants emitted through the process of removing harmful substances from the primary scrubber and re-treatment of gases emitted from the secondary scrubber is further lowered. Results and Discussion : In this study, a cooling block device which is a hazardous gas treatment part is developed to solve the limitation of scrubber processing capacity from overcapacity harmful gases such as strong toxicity, corrosivity, combustion, and environmental pollution in semiconductor manufacturing process. Conclusions : In the design factors and performance survey of cooling module using thermoelectric element, it was calculated that the cooling capacity of the peltier thermoelectric element with a margin of 9,300 W was required. Based on these results, the absolute humidity decreased by 5.8 g/kg and the temperature decreased by 9.5 degrees, showing the possibility of solving the problem of the decrease in the effectiveness of hazardous gas treatment of secondary scrubber due to increased moisture.http://www.jksee.or.kr/journal/view.php?number=4313semiconductor manufacturing processscrubberpeltier thermoelectric elementabsolute humiditycooling capacity |
| spellingShingle | Dong Sub Lee Jin Hee Kim Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency 대한환경공학회지 semiconductor manufacturing process scrubber peltier thermoelectric element absolute humidity cooling capacity |
| title | Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency |
| title_full | Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency |
| title_fullStr | Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency |
| title_full_unstemmed | Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency |
| title_short | Study on the Development of Small Cooling Module System for Scrubber to Improve Toxic Gas Treatment Efficiency |
| title_sort | study on the development of small cooling module system for scrubber to improve toxic gas treatment efficiency |
| topic | semiconductor manufacturing process scrubber peltier thermoelectric element absolute humidity cooling capacity |
| url | http://www.jksee.or.kr/journal/view.php?number=4313 |
| work_keys_str_mv | AT dongsublee studyonthedevelopmentofsmallcoolingmodulesystemforscrubbertoimprovetoxicgastreatmentefficiency AT jinheekim studyonthedevelopmentofsmallcoolingmodulesystemforscrubbertoimprovetoxicgastreatmentefficiency |