Design and fabrication of an opto-mechanical antenna in the NIR range
In this study we present a novel device for the direct transduction of optical radiation in the near-infrared region into mechanical actuation, which is based on a plasmonic optical nanoantenna integrated in a microcantilever. We propose and demonstrate the feasibility of a simple fabrication proces...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2024-06-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007224000042 |
| _version_ | 1797263593554575360 |
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| author | Daniyal Khosh Maram Xavier Borrisé Joan Garcia-Garcia Raul Ruiz Xavier Cartoixà Gabriel Abadal |
| author_facet | Daniyal Khosh Maram Xavier Borrisé Joan Garcia-Garcia Raul Ruiz Xavier Cartoixà Gabriel Abadal |
| author_sort | Daniyal Khosh Maram |
| collection | DOAJ |
| description | In this study we present a novel device for the direct transduction of optical radiation in the near-infrared region into mechanical actuation, which is based on a plasmonic optical nanoantenna integrated in a microcantilever. We propose and demonstrate the feasibility of a simple fabrication process consisting in the nano-tailoring of a commercially available Atomic Force Microscope (AFM) cantilever by means of the Focused Ion Beam (FIB) milling technique. Furthermore, the comprehensive analysis of the device performance characteristics included in this work reveals the different sensitivity values of these characteristics to the fabrication process tolerances of the most relevant geometric design parameters. |
| first_indexed | 2024-04-25T00:15:28Z |
| format | Article |
| id | doaj.art-155afce2b50547d7b94e74d2c38164dc |
| institution | Directory Open Access Journal |
| issn | 2590-0072 |
| language | English |
| last_indexed | 2024-04-25T00:15:28Z |
| publishDate | 2024-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Micro and Nano Engineering |
| spelling | doaj.art-155afce2b50547d7b94e74d2c38164dc2024-03-13T04:46:19ZengElsevierMicro and Nano Engineering2590-00722024-06-0123100241Design and fabrication of an opto-mechanical antenna in the NIR rangeDaniyal Khosh Maram0Xavier Borrisé1Joan Garcia-Garcia2Raul Ruiz3Xavier Cartoixà4Gabriel Abadal5Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, Spain; Corresponding author.Catalan Institute of Nanoscience and Nanotechnology (ICN2) and Barcelona Institute of Science and Technology (BIST), Barcelona, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, SpainDepartament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, 08193 Bellaterra, Barcelona, SpainIn this study we present a novel device for the direct transduction of optical radiation in the near-infrared region into mechanical actuation, which is based on a plasmonic optical nanoantenna integrated in a microcantilever. We propose and demonstrate the feasibility of a simple fabrication process consisting in the nano-tailoring of a commercially available Atomic Force Microscope (AFM) cantilever by means of the Focused Ion Beam (FIB) milling technique. Furthermore, the comprehensive analysis of the device performance characteristics included in this work reveals the different sensitivity values of these characteristics to the fabrication process tolerances of the most relevant geometric design parameters.http://www.sciencedirect.com/science/article/pii/S2590007224000042Opto-mechanical antennaNIR optical detectorPlasmonic optical nanoantennaMEMS/NEMS resonators |
| spellingShingle | Daniyal Khosh Maram Xavier Borrisé Joan Garcia-Garcia Raul Ruiz Xavier Cartoixà Gabriel Abadal Design and fabrication of an opto-mechanical antenna in the NIR range Micro and Nano Engineering Opto-mechanical antenna NIR optical detector Plasmonic optical nanoantenna MEMS/NEMS resonators |
| title | Design and fabrication of an opto-mechanical antenna in the NIR range |
| title_full | Design and fabrication of an opto-mechanical antenna in the NIR range |
| title_fullStr | Design and fabrication of an opto-mechanical antenna in the NIR range |
| title_full_unstemmed | Design and fabrication of an opto-mechanical antenna in the NIR range |
| title_short | Design and fabrication of an opto-mechanical antenna in the NIR range |
| title_sort | design and fabrication of an opto mechanical antenna in the nir range |
| topic | Opto-mechanical antenna NIR optical detector Plasmonic optical nanoantenna MEMS/NEMS resonators |
| url | http://www.sciencedirect.com/science/article/pii/S2590007224000042 |
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