A Microlens Array Grating for Miniature Multi-Channel Spectrometers
Most existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for min...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-10-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/20/8381 |
| _version_ | 1797572308478459904 |
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| author | Shuonan Shan Jingwen Li Peiyuan Liu Qiaolin Li Xiaohao Wang Xinghui Li |
| author_facet | Shuonan Shan Jingwen Li Peiyuan Liu Qiaolin Li Xiaohao Wang Xinghui Li |
| author_sort | Shuonan Shan |
| collection | DOAJ |
| description | Most existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for miniature multi-channel spectrometers. A transmissive element integrating microlens arrays and gratings, the MLAG, enables simultaneous focusing and dispersion. Using soft lithography, the MLAG was fabricated with a deviation of less than 2.2%. The dimensions are 10 mm × 10 mm × 4 mm with over 2000 available units. The MLAG spectrometer operates in the 400–700 nm wavelength range with a resolution of 6 nm. Additionally, the designed MLAG multi-channel spectrometer is experimentally verified to have independently valid cells that can be used in multichannel spectrometers. The wavelength position repeatability deviation of each cell is about 0.5 nm, and the repeatability of displacement measurements by the chromatic confocal sensor with the designed MLAG multi-channel spectrometer is less than 0.5 μm. |
| first_indexed | 2024-03-10T20:54:24Z |
| format | Article |
| id | doaj.art-17beb9df5e2546e8b3fceb0c8f66bea7 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T20:54:24Z |
| publishDate | 2023-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-17beb9df5e2546e8b3fceb0c8f66bea72023-11-19T18:02:01ZengMDPI AGSensors1424-82202023-10-012320838110.3390/s23208381A Microlens Array Grating for Miniature Multi-Channel SpectrometersShuonan Shan0Jingwen Li1Peiyuan Liu2Qiaolin Li3Xiaohao Wang4Xinghui Li5Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaShenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaShenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaShenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaShenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaShenzhen International Graduate School, Tsinghua University, Shenzhen 518055, ChinaMost existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for miniature multi-channel spectrometers. A transmissive element integrating microlens arrays and gratings, the MLAG, enables simultaneous focusing and dispersion. Using soft lithography, the MLAG was fabricated with a deviation of less than 2.2%. The dimensions are 10 mm × 10 mm × 4 mm with over 2000 available units. The MLAG spectrometer operates in the 400–700 nm wavelength range with a resolution of 6 nm. Additionally, the designed MLAG multi-channel spectrometer is experimentally verified to have independently valid cells that can be used in multichannel spectrometers. The wavelength position repeatability deviation of each cell is about 0.5 nm, and the repeatability of displacement measurements by the chromatic confocal sensor with the designed MLAG multi-channel spectrometer is less than 0.5 μm.https://www.mdpi.com/1424-8220/23/20/8381microlens arraygratingfabricationPDMSsoft lithographyminiature multi-channel spectrometer |
| spellingShingle | Shuonan Shan Jingwen Li Peiyuan Liu Qiaolin Li Xiaohao Wang Xinghui Li A Microlens Array Grating for Miniature Multi-Channel Spectrometers Sensors microlens array grating fabrication PDMS soft lithography miniature multi-channel spectrometer |
| title | A Microlens Array Grating for Miniature Multi-Channel Spectrometers |
| title_full | A Microlens Array Grating for Miniature Multi-Channel Spectrometers |
| title_fullStr | A Microlens Array Grating for Miniature Multi-Channel Spectrometers |
| title_full_unstemmed | A Microlens Array Grating for Miniature Multi-Channel Spectrometers |
| title_short | A Microlens Array Grating for Miniature Multi-Channel Spectrometers |
| title_sort | microlens array grating for miniature multi channel spectrometers |
| topic | microlens array grating fabrication PDMS soft lithography miniature multi-channel spectrometer |
| url | https://www.mdpi.com/1424-8220/23/20/8381 |
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