Wafer-Scale Synthesis of WS2 Films with In Situ Controllable p-Type Doping by Atomic Layer Deposition

Wafer-Scale Synthesis of WS2 Films with In Situ Controllable p-Type Doping by Atomic Layer Deposition

Wafer-scale synthesis of p-type TMD films is critical for its commercialization in next-generation electro/optoelectronics. In this work, wafer-scale intrinsic n-type WS2 films and in situ Nb-doped p-type WS2 films were synthesized through atomic layer deposition (ALD) on 8-inch α-Al2O3/Si wafers, 2...

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Bibliographic Details
Main Authors: Hanjie Yang, Yang Wang, Xingli Zou, Rongxu Bai, Zecheng Wu, Sheng Han, Tao Chen, Shen Hu, Hao Zhu, Lin Chen, David W. Zhang, Jack C. Lee, Xionggang Lu, Peng Zhou, Qingqing Sun, Edward T. Yu, Deji Akinwande, Li Ji
Format: Article
Language:English
Published: American Association for the Advancement of Science (AAAS) 2021-01-01
Series:Research
Online Access:http://dx.doi.org/10.34133/2021/9862483

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