Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity

β-Ga<sub>2</sub>O<sub>3</sub> photodetectors have the advantages of low dark current and strong radiation resistance in UV detection. However, the limited photocurrent has restricted their applications. Herein, MSM UV photodetectors based on (In<sub>x</sub>Ga<s...

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Main Authors: Yupeng Zhang, Ruiheng Zhou, Xinyan Liu, Zhengyu Bi, Shengping Ruan, Yan Ma, Xin Li, Caixia Liu, Yu Chen, Jingran Zhou
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/24/3/787
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author Yupeng Zhang
Ruiheng Zhou
Xinyan Liu
Zhengyu Bi
Shengping Ruan
Yan Ma
Xin Li
Caixia Liu
Yu Chen
Jingran Zhou
author_facet Yupeng Zhang
Ruiheng Zhou
Xinyan Liu
Zhengyu Bi
Shengping Ruan
Yan Ma
Xin Li
Caixia Liu
Yu Chen
Jingran Zhou
author_sort Yupeng Zhang
collection DOAJ
description β-Ga<sub>2</sub>O<sub>3</sub> photodetectors have the advantages of low dark current and strong radiation resistance in UV detection. However, the limited photocurrent has restricted their applications. Herein, MSM UV photodetectors based on (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> (x = 0, 0.1, 0.2, 0.3) by a sol-gel method were fabricated and studied. The doping of indium ions in Ga<sub>2</sub>O<sub>3</sub> leads to lattice distortion and promotes the formation of oxygen vacancies. The oxygen vacancies in (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> can be modulated by various proportions of indium, and the increased oxygen vacancies contribute to the enhancement of electron concentration. The results show that the amorphous In<sub>0.4</sub>Ga<sub>1.6</sub>O<sub>3</sub> photodetector exhibited improved performances, including a high light-to-dark current ratio (2.8 × 10<sup>3</sup>) and high responsivity (739.2 A/W). This work provides a promising semiconductor material In<sub>0.4</sub>Ga<sub>1.6</sub>O<sub>3</sub> for high-performance MSM UV photodetectors.
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spelling doaj.art-1829f711eb4d46c58412df81c6a1ba1b2024-02-09T15:21:50ZengMDPI AGSensors1424-82202024-01-0124378710.3390/s24030787Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High ResponsivityYupeng Zhang0Ruiheng Zhou1Xinyan Liu2Zhengyu Bi3Shengping Ruan4Yan Ma5Xin Li6Caixia Liu7Yu Chen8Jingran Zhou9College of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, ChinaInstitute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaCollege of Electronic Science & Engineering, Jilin University, Changchun 130012, Chinaβ-Ga<sub>2</sub>O<sub>3</sub> photodetectors have the advantages of low dark current and strong radiation resistance in UV detection. However, the limited photocurrent has restricted their applications. Herein, MSM UV photodetectors based on (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> (x = 0, 0.1, 0.2, 0.3) by a sol-gel method were fabricated and studied. The doping of indium ions in Ga<sub>2</sub>O<sub>3</sub> leads to lattice distortion and promotes the formation of oxygen vacancies. The oxygen vacancies in (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> can be modulated by various proportions of indium, and the increased oxygen vacancies contribute to the enhancement of electron concentration. The results show that the amorphous In<sub>0.4</sub>Ga<sub>1.6</sub>O<sub>3</sub> photodetector exhibited improved performances, including a high light-to-dark current ratio (2.8 × 10<sup>3</sup>) and high responsivity (739.2 A/W). This work provides a promising semiconductor material In<sub>0.4</sub>Ga<sub>1.6</sub>O<sub>3</sub> for high-performance MSM UV photodetectors.https://www.mdpi.com/1424-8220/24/3/787ultraviolet photodetectorhigh responsivity(In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub>oxygen vacancies
spellingShingle Yupeng Zhang
Ruiheng Zhou
Xinyan Liu
Zhengyu Bi
Shengping Ruan
Yan Ma
Xin Li
Caixia Liu
Yu Chen
Jingran Zhou
Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
Sensors
ultraviolet photodetector
high responsivity
(In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub>
oxygen vacancies
title Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
title_full Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
title_fullStr Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
title_full_unstemmed Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
title_short Sol-Gel Synthesized Amorphous (In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub> for UV Photodetection with High Responsivity
title_sort sol gel synthesized amorphous in sub x sub ga sub 1 x sub sub 2 sub o sub 3 sub for uv photodetection with high responsivity
topic ultraviolet photodetector
high responsivity
(In<sub>x</sub>Ga<sub>1−x</sub>)<sub>2</sub>O<sub>3</sub>
oxygen vacancies
url https://www.mdpi.com/1424-8220/24/3/787
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