Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their func¬tional sensitivity and the electronic noise in the thick-film resistors. Both the se...

Full description

Bibliographic Details
Main Authors: M. S. Zarnik, D. Belavic, V. Sedlakova, J. Sikula, M. Kopecky, P. Sedlak, J. Majzner
Format: Article
Language:English
Published: Spolecnost pro radioelektronicke inzenyrstvi 2013-04-01
Series:Radioengineering
Subjects:
LTCC pressure sensor
intrinsic resolution
noise spectral density
Online Access:http://www.radioeng.cz/fulltexts/2013/13_01_0227_0232.pdf

Similar Items

Similar Items