A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor
This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive di...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-11-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/11/1022 |
| _version_ | 1827701739253399552 |
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| author | Chao Xiang Yulan Lu Pengcheng Yan Jian Chen Junbo Wang Deyong Chen |
| author_facet | Chao Xiang Yulan Lu Pengcheng Yan Jian Chen Junbo Wang Deyong Chen |
| author_sort | Chao Xiang |
| collection | DOAJ |
| description | This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa). |
| first_indexed | 2024-03-10T14:39:38Z |
| format | Article |
| id | doaj.art-1902262b76724972a5bdf619a4794a00 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T14:39:38Z |
| publishDate | 2020-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-1902262b76724972a5bdf619a4794a002023-11-20T21:51:04ZengMDPI AGMicromachines2072-666X2020-11-011111102210.3390/mi11111022A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature SensorChao Xiang0Yulan Lu1Pengcheng Yan2Jian Chen3Junbo Wang4Deyong Chen5State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaThis paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa).https://www.mdpi.com/2072-666X/11/11/1022resonant pressure microsensorsilicon-on-glass captemperature compensationpolynomial fitting |
| spellingShingle | Chao Xiang Yulan Lu Pengcheng Yan Jian Chen Junbo Wang Deyong Chen A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor Micromachines resonant pressure microsensor silicon-on-glass cap temperature compensation polynomial fitting |
| title | A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor |
| title_full | A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor |
| title_fullStr | A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor |
| title_full_unstemmed | A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor |
| title_short | A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor |
| title_sort | resonant pressure microsensor with temperature compensation method based on differential outputs and a temperature sensor |
| topic | resonant pressure microsensor silicon-on-glass cap temperature compensation polynomial fitting |
| url | https://www.mdpi.com/2072-666X/11/11/1022 |
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