Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequ...

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Bibliographic Details
Main Authors: Ventsislav Yantchev, Ilia Katardjiev, Vesseline Strashilov, Ivan D. Avramov, Ekaterina Radeva, Gergana Alexieva, Lilia Arapan
Format: Article
Language:English
Published: MDPI AG 2011-07-01
Series:Sensors
Subjects:
resonator
aluminum nitride
membrane
HMDSO
gravimetric
sensitivity
Online Access:http://www.mdpi.com/1424-8220/11/7/6942/

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