| Summary: | Porous silicon nanowires (pSi NWs) have attracted considerable interest due to their unique structural, optical properties and biocompatibility. The most common method for their top-down synthesis is metal-assisted chemical etching (MACE) of crystalline silicon (c-Si) wafers using silver nanoparticles as a catalyst. However, the replacement of silver with bioinert gold nanoparticles (Au NPs) markedly improves the efficiency of pSi NWs in biomedical applications. The present study demonstrates the fabrication of porous pSi NWs arrays using Au NPs as the catalyst in MACE of c-Si wafers with a resistivity of 1–5 mOhm·cm. Using scanning electron microscopy (SEM), the formation of arrays of porous nanowires with a diameter of 50 nm that consist of small silicon nanocrystals (nc-Si) and pores was observed. Raman spectroscopy analysis determined the size of nc-Si is about 4 nm. The pSi NWs exhibit effective photoluminescence (PL) with a peak in the red spectrum, which is attributed to the quantum confinement effect occurred in small 4 nm nc-Si. In addition, the pSi NWs exhibit low toxicity towards MCF-7 cancer cells, and their PL characteristics allow them to be used as contrast agents for bioimaging
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