Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density

Vibration in ultra-precision machining is an inherent physical phenomenon and a key factor affecting surface generation. However, the influence of the vibration characteristics of aerostatic guideways on the machining morphology has not been fully studied. In this article, a diamond micro-planing ex...

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Main Authors: Jianhua Yao, Ziqiang Yin, Yawen Guo
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/12/21/11022
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author Jianhua Yao
Ziqiang Yin
Yawen Guo
author_facet Jianhua Yao
Ziqiang Yin
Yawen Guo
author_sort Jianhua Yao
collection DOAJ
description Vibration in ultra-precision machining is an inherent physical phenomenon and a key factor affecting surface generation. However, the influence of the vibration characteristics of aerostatic guideways on the machining morphology has not been fully studied. In this article, a diamond micro-planing experiment was carried out on an oxygen-free copper workpiece using a homemade three-axis machine tool, and a white-light interferometer was used to measure the surface topography of the planing surface. The power spectral density of the surface topography was analyzed, and the spatial wavelength components of the surface topography were extracted. Then, the vibration characteristics of the aerostatic guideway were measured in both the space domain and the time domain. A comprehensive analysis of the main components of the workpiece surface error morphology and the vibration characteristics of the guideway shows that the time-domain vibration of the aerostatic guideway is the main factor causing the surface topography error of the workpiece.
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spelling doaj.art-19907cdeb0d447dd95ed431582887d9d2023-11-24T03:36:41ZengMDPI AGApplied Sciences2076-34172022-10-0112211102210.3390/app122111022Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral DensityJianhua Yao0Ziqiang Yin1Yawen Guo2State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaState Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou 510006, ChinaVibration in ultra-precision machining is an inherent physical phenomenon and a key factor affecting surface generation. However, the influence of the vibration characteristics of aerostatic guideways on the machining morphology has not been fully studied. In this article, a diamond micro-planing experiment was carried out on an oxygen-free copper workpiece using a homemade three-axis machine tool, and a white-light interferometer was used to measure the surface topography of the planing surface. The power spectral density of the surface topography was analyzed, and the spatial wavelength components of the surface topography were extracted. Then, the vibration characteristics of the aerostatic guideway were measured in both the space domain and the time domain. A comprehensive analysis of the main components of the workpiece surface error morphology and the vibration characteristics of the guideway shows that the time-domain vibration of the aerostatic guideway is the main factor causing the surface topography error of the workpiece.https://www.mdpi.com/2076-3417/12/21/11022power spectral density (PSD)diamond planingporous aerostatic guidewaysurface error
spellingShingle Jianhua Yao
Ziqiang Yin
Yawen Guo
Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
Applied Sciences
power spectral density (PSD)
diamond planing
porous aerostatic guideway
surface error
title Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
title_full Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
title_fullStr Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
title_full_unstemmed Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
title_short Analysis of Surface Profile Error of Ultra-Precision Diamond Planing Based on Power Spectral Density
title_sort analysis of surface profile error of ultra precision diamond planing based on power spectral density
topic power spectral density (PSD)
diamond planing
porous aerostatic guideway
surface error
url https://www.mdpi.com/2076-3417/12/21/11022
work_keys_str_mv AT jianhuayao analysisofsurfaceprofileerrorofultraprecisiondiamondplaningbasedonpowerspectraldensity
AT ziqiangyin analysisofsurfaceprofileerrorofultraprecisiondiamondplaningbasedonpowerspectraldensity
AT yawenguo analysisofsurfaceprofileerrorofultraprecisiondiamondplaningbasedonpowerspectraldensity