Discharge current modes of high power impulse magnetron sputtering
Based on the production and disappearance of ions and electrons in the high power impulse magnetron sputtering plasma near the target, the expression of the discharge current is derived. Depending on the slope, six possible modes are deduced for the discharge current and the feasibility of each mode...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2015-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4932135 |
| _version_ | 1818417990049202176 |
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| author | Zhongzhen Wu Shu Xiao Zhengyong Ma Suihan Cui Shunping Ji Xiubo Tian Ricky K. Y. Fu Paul K. Chu Feng Pan |
| author_facet | Zhongzhen Wu Shu Xiao Zhengyong Ma Suihan Cui Shunping Ji Xiubo Tian Ricky K. Y. Fu Paul K. Chu Feng Pan |
| author_sort | Zhongzhen Wu |
| collection | DOAJ |
| description | Based on the production and disappearance of ions and electrons in the high power impulse magnetron sputtering plasma near the target, the expression of the discharge current is derived. Depending on the slope, six possible modes are deduced for the discharge current and the feasibility of each mode is discussed. The discharge parameters and target properties are simplified into the discharge voltage, sputtering yield, and ionization energy which mainly affect the discharge plasma. The relationship between these factors and the discharge current modes is also investigated. |
| first_indexed | 2024-12-14T12:15:33Z |
| format | Article |
| id | doaj.art-1992fe0d0fe447bca93731faba474ca9 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-14T12:15:33Z |
| publishDate | 2015-09-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-1992fe0d0fe447bca93731faba474ca92022-12-21T23:01:38ZengAIP Publishing LLCAIP Advances2158-32262015-09-0159097178097178-810.1063/1.4932135094509ADVDischarge current modes of high power impulse magnetron sputteringZhongzhen Wu0Shu Xiao1Zhengyong Ma2Suihan Cui3Shunping Ji4Xiubo Tian5Ricky K. Y. Fu6Paul K. Chu7Feng Pan8School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaSchool of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaSchool of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaSchool of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaSchool of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaState Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, ChinaDepartment of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, ChinaDepartment of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, ChinaSchool of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, ChinaBased on the production and disappearance of ions and electrons in the high power impulse magnetron sputtering plasma near the target, the expression of the discharge current is derived. Depending on the slope, six possible modes are deduced for the discharge current and the feasibility of each mode is discussed. The discharge parameters and target properties are simplified into the discharge voltage, sputtering yield, and ionization energy which mainly affect the discharge plasma. The relationship between these factors and the discharge current modes is also investigated.http://dx.doi.org/10.1063/1.4932135 |
| spellingShingle | Zhongzhen Wu Shu Xiao Zhengyong Ma Suihan Cui Shunping Ji Xiubo Tian Ricky K. Y. Fu Paul K. Chu Feng Pan Discharge current modes of high power impulse magnetron sputtering AIP Advances |
| title | Discharge current modes of high power impulse magnetron sputtering |
| title_full | Discharge current modes of high power impulse magnetron sputtering |
| title_fullStr | Discharge current modes of high power impulse magnetron sputtering |
| title_full_unstemmed | Discharge current modes of high power impulse magnetron sputtering |
| title_short | Discharge current modes of high power impulse magnetron sputtering |
| title_sort | discharge current modes of high power impulse magnetron sputtering |
| url | http://dx.doi.org/10.1063/1.4932135 |
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