Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS<sub>2</sub>

Direct van der Waals Epitaxy of Crack-Free AlN Thin Film on Epitaxial WS<sub>2</sub>

Van der Waals epitaxy (vdWE) has drawn continuous attention, as it is unlimited by lattice-mismatch between epitaxial layers and substrates. Previous reports on the vdWE of III-nitride thin film were mainly based on two-dimensional (2D) materials by plasma pretreatment or pre-doping of other hexagon...

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Bibliographic Details
Main Authors: Yue Yin, Fang Ren, Yunyu Wang, Zhiqiang Liu, Jinping Ao, Meng Liang, Tongbo Wei, Guodong Yuan, Haiyan Ou, Jianchang Yan, Xiaoyan Yi, Junxi Wang, Jinmin Li
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Materials
Subjects:
AlN thin film
WS<sub>2</sub>
MOCVD
van der Waals epitaxy
Online Access:https://www.mdpi.com/1996-1944/11/12/2464

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https://www.mdpi.com/1996-1944/11/12/2464

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