An Accurate Quantitative X-ray Photoelectron Spectroscopy Study of Pure and Homogeneous ZrN Thin Films Deposited Using BPDMS
A quantitative X-ray Photoelectron Spectroscopy (XPS) study has been undertaken on different experimental data sets of ZrN thin films deposited using reactive Bipolar Pulsed Dual-Magnetron Sputtering (BPDMS) on silicon/stainless steel substates, to obtain dense, pure and homogeneous coatings, free f...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/3/1271 |