Nano-indentation study of dislocation evolution in GaN-based laser diodes

Abstract The slip systems and motion behavior of dislocations induced by nano-indentation technique in GaN-based LDs were investigated. Dislocations with burgers vector of b = 1/3 <11 $$\overline{2}$$ 2 ¯ 3> were introduced on either {11 $$\overline{2}$$ 2 ¯ 2} <11 $$\overline{2}$$ 2 ¯ 3>...

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Main Authors: Jingjing Chen, Xujun Su, Guobing Wang, Mutong Niu, Xinran Li, Ke Xu
Format: Article
Language:English
Published: Springer 2024-03-01
Series:Discover Nano
Subjects:
Online Access:https://doi.org/10.1186/s11671-024-03983-0
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author Jingjing Chen
Xujun Su
Guobing Wang
Mutong Niu
Xinran Li
Ke Xu
author_facet Jingjing Chen
Xujun Su
Guobing Wang
Mutong Niu
Xinran Li
Ke Xu
author_sort Jingjing Chen
collection DOAJ
description Abstract The slip systems and motion behavior of dislocations induced by nano-indentation technique in GaN-based LDs were investigated. Dislocations with burgers vector of b = 1/3 <11 $$\overline{2}$$ 2 ¯ 3> were introduced on either {11 $$\overline{2}$$ 2 ¯ 2} <11 $$\overline{2}$$ 2 ¯ 3>, or {1 $$\overline{1}$$ 1 ¯ 01} <11 $$\overline{2}$$ 2 ¯ 3> pyramidal slip systems in the upper p-GaN layer. Besides, {0001} <11 $$\overline{2}$$ 2 ¯ 0> basal slip system was also activated. The AlGaN/InGaN multi-layers in device can provide mismatch stresses to prevent dislocations from slipping through. It was observed that the density of dislocations induced by the indenter significantly decreased from the upper to the lower regions of the multi-layers. The a + c dislocations on pyramidal slip planes were mostly blocked by the strained layers.
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spelling doaj.art-1a016f3b82bb416cbdd1ab13ccfbaabf2024-03-10T12:20:21ZengSpringerDiscover Nano2731-92292024-03-011911710.1186/s11671-024-03983-0Nano-indentation study of dislocation evolution in GaN-based laser diodesJingjing Chen0Xujun Su1Guobing Wang2Mutong Niu3Xinran Li4Ke Xu5Suzhou Institute of Nano-tech and Nano-bionics, CASSuzhou Institute of Nano-tech and Nano-bionics, CASShenyang National Laboratory for Materials Science, Jiangsu Institute of Advanced SemiconductorsSuzhou Institute of Nano-tech and Nano-bionics, CASSuzhou Institute of Nano-tech and Nano-bionics, CASSuzhou Institute of Nano-tech and Nano-bionics, CASAbstract The slip systems and motion behavior of dislocations induced by nano-indentation technique in GaN-based LDs were investigated. Dislocations with burgers vector of b = 1/3 <11 $$\overline{2}$$ 2 ¯ 3> were introduced on either {11 $$\overline{2}$$ 2 ¯ 2} <11 $$\overline{2}$$ 2 ¯ 3>, or {1 $$\overline{1}$$ 1 ¯ 01} <11 $$\overline{2}$$ 2 ¯ 3> pyramidal slip systems in the upper p-GaN layer. Besides, {0001} <11 $$\overline{2}$$ 2 ¯ 0> basal slip system was also activated. The AlGaN/InGaN multi-layers in device can provide mismatch stresses to prevent dislocations from slipping through. It was observed that the density of dislocations induced by the indenter significantly decreased from the upper to the lower regions of the multi-layers. The a + c dislocations on pyramidal slip planes were mostly blocked by the strained layers.https://doi.org/10.1186/s11671-024-03983-0GaNDislocation slip systemAlGaNInGaN
spellingShingle Jingjing Chen
Xujun Su
Guobing Wang
Mutong Niu
Xinran Li
Ke Xu
Nano-indentation study of dislocation evolution in GaN-based laser diodes
Discover Nano
GaN
Dislocation slip system
AlGaN
InGaN
title Nano-indentation study of dislocation evolution in GaN-based laser diodes
title_full Nano-indentation study of dislocation evolution in GaN-based laser diodes
title_fullStr Nano-indentation study of dislocation evolution in GaN-based laser diodes
title_full_unstemmed Nano-indentation study of dislocation evolution in GaN-based laser diodes
title_short Nano-indentation study of dislocation evolution in GaN-based laser diodes
title_sort nano indentation study of dislocation evolution in gan based laser diodes
topic GaN
Dislocation slip system
AlGaN
InGaN
url https://doi.org/10.1186/s11671-024-03983-0
work_keys_str_mv AT jingjingchen nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes
AT xujunsu nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes
AT guobingwang nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes
AT mutongniu nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes
AT xinranli nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes
AT kexu nanoindentationstudyofdislocationevolutioninganbasedlaserdiodes