Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection
The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/8/1565 |
| _version_ | 1797583814324649984 |
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| author | Min Cui Senhui Chuai Yong Huang Yang Liu Jian Li |
| author_facet | Min Cui Senhui Chuai Yong Huang Yang Liu Jian Li |
| author_sort | Min Cui |
| collection | DOAJ |
| description | The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer. |
| first_indexed | 2024-03-10T23:43:19Z |
| format | Article |
| id | doaj.art-1a14e7754ffe45e790124e27b7d393df |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T23:43:19Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-1a14e7754ffe45e790124e27b7d393df2023-11-19T02:13:38ZengMDPI AGMicromachines2072-666X2023-08-01148156510.3390/mi14081565Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance DetectionMin Cui0Senhui Chuai1Yong Huang2Yang Liu3Jian Li4Shanxi Key Laboratory of Information Detection and Processing, North University of China, Taiyuan 030051, ChinaSchool of Instrumentation and Electronics, North University of China, Taiyuan 030051, ChinaShanghai Institute of Aerospace Control Technology, Shanghai 201109, ChinaSchool of Instrumentation and Electronics, North University of China, Taiyuan 030051, ChinaSchool of Information and Communication Engineering, North University of China, Taiyuan 030051, ChinaThe problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.https://www.mdpi.com/2072-666X/14/8/1565PZTlayer counting identificationcapacitive acceleration sensorMEMSLS-DYNA |
| spellingShingle | Min Cui Senhui Chuai Yong Huang Yang Liu Jian Li Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection Micromachines PZT layer counting identification capacitive acceleration sensor MEMS LS-DYNA |
| title | Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection |
| title_full | Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection |
| title_fullStr | Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection |
| title_full_unstemmed | Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection |
| title_short | Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection |
| title_sort | structural design of mems acceleration sensor based on pzt plate capacitance detection |
| topic | PZT layer counting identification capacitive acceleration sensor MEMS LS-DYNA |
| url | https://www.mdpi.com/2072-666X/14/8/1565 |
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