Lateral Fractal Formation by Crystallographic Silicon Micromachining
A novel wafer-scale silicon fractal fabrication method is presented here for forming pyramids only in the lateral direction using the crystal orientation of silicon. Fractals are fabricated in silicon by masking only the corners (corner lithography) of a cavity in silicon with silicon nitride, where...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Fractal and Fractional |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3110/7/2/202 |