Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide
This paper presents results of numerical modeling of a modified design of an optical sensor based on segmented periodic silicon oxynitride (SiON) grating evanescently coupled with silicon wire. This segmented grating works as a leaky waveguide, which filters input power from a broadband optical sour...
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| Format: | Article |
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MDPI AG
2020-09-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/18/5306 |
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| author | Andrei Tsarev Vittorio M. N. Passaro |
| author_facet | Andrei Tsarev Vittorio M. N. Passaro |
| author_sort | Andrei Tsarev |
| collection | DOAJ |
| description | This paper presents results of numerical modeling of a modified design of an optical sensor based on segmented periodic silicon oxynitride (SiON) grating evanescently coupled with silicon wire. This segmented grating works as a leaky waveguide, which filters input power from a broadband optical source and radiates it as an outcoming optical beam with both a small wavelength band and a small beam divergence. The radiation angle strongly depends on the refractive index of the grating environment and provides sensor interrogation by measuring the far field pattern in the focal plane of the lens, which is placed near the sensor element. The device concept was verified by direct numerical modeling through the finite difference time domain (FDTD) method and provided moderate intrinsic limit of detection (iLOD) ~ 0.004 RIU with a possible iLOD ~ 0.001 RIU for 10 mm-long structures. |
| first_indexed | 2024-03-10T16:16:43Z |
| format | Article |
| id | doaj.art-1b1e1bf06c77476c849a7ef7f1b2ec06 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T16:16:43Z |
| publishDate | 2020-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-1b1e1bf06c77476c849a7ef7f1b2ec062023-11-20T13:58:29ZengMDPI AGSensors1424-82202020-09-012018530610.3390/s20185306Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire WaveguideAndrei Tsarev0Vittorio M. N. Passaro1Laboratory of Optical Materials and Structures, Rzhanov Institute of Semiconductor Physics, SB RAS, 630090 Novosibirsk, RussiaPhotonics Research Group, Dipartimento di Ingegneria Elettrica e dell’Informazione, Politecnico di Bari, Via E. Orabona 4, 70125 Bari, ItalyThis paper presents results of numerical modeling of a modified design of an optical sensor based on segmented periodic silicon oxynitride (SiON) grating evanescently coupled with silicon wire. This segmented grating works as a leaky waveguide, which filters input power from a broadband optical source and radiates it as an outcoming optical beam with both a small wavelength band and a small beam divergence. The radiation angle strongly depends on the refractive index of the grating environment and provides sensor interrogation by measuring the far field pattern in the focal plane of the lens, which is placed near the sensor element. The device concept was verified by direct numerical modeling through the finite difference time domain (FDTD) method and provided moderate intrinsic limit of detection (iLOD) ~ 0.004 RIU with a possible iLOD ~ 0.001 RIU for 10 mm-long structures.https://www.mdpi.com/1424-8220/20/18/5306optical sensorssilicon wiresilicon oxynitride (SiON)segmented gratingfar field patternnumerical modeling |
| spellingShingle | Andrei Tsarev Vittorio M. N. Passaro Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide Sensors optical sensors silicon wire silicon oxynitride (SiON) segmented grating far field pattern numerical modeling |
| title | Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide |
| title_full | Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide |
| title_fullStr | Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide |
| title_full_unstemmed | Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide |
| title_short | Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide |
| title_sort | numerical simulation of optical sensing by the far field pattern radiated by periodic grating strips over silica buffer on the silicon wire waveguide |
| topic | optical sensors silicon wire silicon oxynitride (SiON) segmented grating far field pattern numerical modeling |
| url | https://www.mdpi.com/1424-8220/20/18/5306 |
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