A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection

In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO<sub>2</sub>-thin film–Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and...

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Main Authors: Zhi Chen, Yanning Li, Baoyin Jin, Fei Yang, Kun Chen, Dante J. Dorantes-Gonzalez, Zimo Lu, Xiaotang Hu
格式: 文件
语言:English
出版: MDPI AG 2012-08-01
丛编:Sensors
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在线阅读:http://www.mdpi.com/1424-8220/12/8/10500
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author Zhi Chen
Yanning Li
Baoyin Jin
Fei Yang
Kun Chen
Dante J. Dorantes-Gonzalez
Zimo Lu
Xiaotang Hu
author_facet Zhi Chen
Yanning Li
Baoyin Jin
Fei Yang
Kun Chen
Dante J. Dorantes-Gonzalez
Zimo Lu
Xiaotang Hu
author_sort Zhi Chen
collection DOAJ
description In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO<sub>2</sub>-thin film–Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.
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spelling doaj.art-1b6519735ef24459ad2e6632c444614c2022-12-22T02:06:53ZengMDPI AGSensors1424-82202012-08-01128105001051010.3390/s120810500A Four-Quadrant PVDF Transducer for Surface Acoustic Wave DetectionZhi ChenYanning LiBaoyin JinFei YangKun ChenDante J. Dorantes-GonzalezZimo LuXiaotang HuIn this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO<sub>2</sub>-thin film–Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.http://www.mdpi.com/1424-8220/12/8/10500laser-induced surface acoustic wavepiezoelectric transducerPVDF transducerfour-quadrant arrangement
spellingShingle Zhi Chen
Yanning Li
Baoyin Jin
Fei Yang
Kun Chen
Dante J. Dorantes-Gonzalez
Zimo Lu
Xiaotang Hu
A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
Sensors
laser-induced surface acoustic wave
piezoelectric transducer
PVDF transducer
four-quadrant arrangement
title A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
title_full A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
title_fullStr A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
title_full_unstemmed A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
title_short A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection
title_sort four quadrant pvdf transducer for surface acoustic wave detection
topic laser-induced surface acoustic wave
piezoelectric transducer
PVDF transducer
four-quadrant arrangement
url http://www.mdpi.com/1424-8220/12/8/10500
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